公开(公告)号：US20240128109A1

公开(公告)日：2024-04-18

申请号：US18484562

申请日：2023-10-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ji Hun Kim ,  Youn Gon Oh ,  Woo-Ram Moon ,  Sang Hyuk Park ,  Jong Hun Lee ,  Kyu-Sik Jeong

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67706 ,  H01L21/67259 ,  H01L21/67715 ,  H01L21/67733 ,  H01L21/68764

Abstract: An apparatus for manufacturing a semiconductor device includes a substrate transfer unit configured to transfer a substrate, a rail unit including a driving rail extending in a first direction that the substrate transfer unit moves and a stopper on a side of the driving rail in a second direction crossing the first direction, and a lifting unit configured to move in the first direction and a third direction perpendicular to the first and second directions to remove the substrate transfer unit from the rail unit, wherein the lifting unit is configured to contact the stopper to move the stopper from a closed state to an open state.

公开(公告)号：US20250136374A1

公开(公告)日：2025-05-01

申请号：US18608425

申请日：2024-03-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seong Sil JEONG ,  Youn Gon Oh ,  Sang Hyuk Park

IPC: B65G1/04

Abstract: A transport vehicle includes: a frame having an internal area; a driver on top of the frame, the driver being configured to travel along a rail; a support structure in the internal area, the support structure being configured to seat, thereon, a drone configured to transport an article; and a controller configured to control an operation of at least one of the driver and the support structure.

公开(公告)号：US20240124230A1

公开(公告)日：2024-04-18

申请号：US18217058

申请日：2023-06-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youn Gon Oh ,  Ji Hun Kim ,  Sang Hyuk Park ,  Young-Kyu Kim

IPC: B65G1/06 ,  B65G1/04 ,  B65G49/06

CPC classification number: B65G1/065 ,  B65G1/0414 ,  B65G49/062 ,  B65G49/067 ,  B65G2201/0297

Abstract: An inter-floor transport system includes a first interface unit at a first floor and configured to receive containers from a transport vehicle, and a car configured to receive containers from the first interface unit at the first floor and move containers to a second floor, where the car includes a cage, a storage unit in the cage and including a plurality of storage areas, and an arrangement unit in the cage, the arrangement unit being configured to receive containers from the first interface unit and store containers in respective storage areas of the plurality of storage areas of the storage unit.