SEMICONDUCTOR MEMORY DEVICE AND  METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20240121945A1

    公开(公告)日:2024-04-11

    申请号:US18347927

    申请日:2023-07-06

    CPC classification number: H10B12/34 H10B12/053 H10B12/315

    Abstract: A semiconductor memory device comprises a substrate including a first source/drain region and a second source/drain region, a trench between the first source/drain region and the second source/drain region and formed in the substrate, a cell gate insulating layer on sidewalls and a bottom surface of the trench, a cell gate electrode on the cell gate insulating layer, a work function control pattern on the cell gate electrode, including N-type impurities and a cell gate capping pattern on the work function control pattern. The work function control pattern includes a semiconductor material. The work function control pattern includes a first region and a second region between the first region and the cell gate electrode. A concentration of the N-type impurities in the first region is greater than a concentration of the N-type impurities in the second region.

    Substrate transfer system
    3.
    发明授权

    公开(公告)号:US11984338B2

    公开(公告)日:2024-05-14

    申请号:US17745595

    申请日:2022-05-16

    CPC classification number: H01L21/6773 B66C19/00 H01L21/67736

    Abstract: A substrate transfer system capable of performing efficient distribution exchange between fabricating facilities is provided. The substrate transfer system includes a lower rail, an upper rail which is located above the lower rail from a ground plane, and extends to be parallel to the lower rail, a conveyor which extends to intersect the lower rail and the upper rail, below the lower rail, a first lower transport unit which transports a first carrier along the lower rail and unloads the first carrier onto the conveyor, and a first upper transport unit which transports a second carrier along the upper rail and unloads the second carrier onto the conveyor, wherein the conveyor includes a linear module which moves the first carrier and the second carrier in a linear direction, and a turning module which turns the first carrier and the second carrier.

    Method for reducing current consumption, and electronic device

    公开(公告)号:US11175717B2

    公开(公告)日:2021-11-16

    申请号:US16086084

    申请日:2017-03-17

    Abstract: Various examples of the present invention relate to an electronic device comprising: a graphic buffer for storing graphic information received from an application; a frame buffer for storing the graphic information to be displayed on a display; and a processor, wherein the processor is configured to: store, in the graphic buffer, first graphic information received from a first layer; store, in the frame buffer, second graphic information received from a second layer; store, in the frame buffer, the first graphic information stored in the graphic buffer; and simultaneously display the first graphic information and the second graphic information, stored in the frame buffer, through the display functionally connected with the processor. In addition, other examples identifiable through the specification are possible.

    Semiconductor device
    5.
    发明授权

    公开(公告)号:US10249627B2

    公开(公告)日:2019-04-02

    申请号:US15621315

    申请日:2017-06-13

    Abstract: A semiconductor device is provided. The semiconductor device includes an upper interlayer insulating layer disposed on a substrate. A first electrode spaced apart from the upper interlayer insulating layer is disposed on the substrate. A contact structure penetrating the upper interlayer insulating layer is disposed on the substrate. An upper support layer having a first portion covering an upper surface of the upper interlayer insulating layer, to surround an upper side surface of the contact structure, and a second portion extending in a horizontal direction from the first portion and surrounding an upper side surface of the first electrode, is disposed. A dielectric conformally covering the first electrode and a second electrode on the dielectric are disposed.

    Semiconductor devices including channel dopant layer
    6.
    发明授权
    Semiconductor devices including channel dopant layer 有权
    包括沟道掺杂剂层的半导体器件

    公开(公告)号:US09484409B2

    公开(公告)日:2016-11-01

    申请号:US14846176

    申请日:2015-09-04

    Abstract: A semiconductor device includes a semiconductor substrate including a well dopant layer having a first conductivity type, a gate electrode on the well dopant layer, a channel dopant layer in the well dopant layer and spaced apart from a top surface of the semiconductor substrate, a channel region between the gate electrode and the channel dopant layer, and source/drain regions in the well dopant layer at both sides of the gate electrode. The channel dopant layer and the channel region have the first conductivity type. The source/drain regions have a second conductivity type. A concentration of dopants having the first conductivity type in the channel dopant layer is higher than a concentration of dopants having the first conductivity type in the channel region. The semiconductor device may be used in a sense amplifier of a memory device.

    Abstract translation: 一种半导体器件包括:半导体衬底,包括具有第一导电类型的阱掺杂剂层,阱掺杂剂层上的栅极电极,阱掺杂剂层中的沟道掺杂剂层,并且与半导体衬底的顶表面间隔开;沟道 栅电极和沟道掺杂剂层之间的区域以及栅电极两侧的阱掺杂剂层中的源/漏区。 沟道掺杂剂层和沟道区具有第一导电类型。 源极/漏极区域具有第二导电类型。 在沟道掺杂剂层中具有第一导电类型的掺杂剂的浓度高于沟道区中具有第一导电类型的掺杂剂的浓度。 半导体器件可以用在存储器件的读出放大器中。

    Substrate analysis apparatus and substrate analysis method

    公开(公告)号:US11982705B2

    公开(公告)日:2024-05-14

    申请号:US17690317

    申请日:2022-03-09

    CPC classification number: G01R31/2831 H01L21/6735 H01L21/6773

    Abstract: A substrate analysis apparatus is provided. The substrate analysis includes: an interlayer conveying module configured to transport a first FOUP; an exchange module which is connected to the interlayer conveying module, and configured to transfer a wafer from the first FOUP to a second FOUP; a pre-processing module configured to form a test wafer piece using the wafer inside the second FOUP; an analysis module configured to analyze the test wafer piece; and a transfer rail configured to transport the second FOUP containing the wafer and a tray containing the test wafer piece. The wafer includes a first identifier indicating information corresponding to the wafer, the test wafer piece includes a second identifier indicating information generated by the pre-processing module which corresponds to the test wafer piece, and the analysis module is configured to analyze the first identifier and the second identifier in connection with each other.

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