公开(公告)号：US20140239256A1

公开(公告)日：2014-08-28

申请号：US14070999

申请日：2013-11-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang-woo KIM ,  Sang-a HAN

IPC: H01L21/02 ,  H01L29/16

CPC classification number: H01L21/0237 ,  B82Y40/00 ,  C30B29/02 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/0262 ,  H01L29/1606 ,  H01L29/267 ,  H01L29/778

Abstract: A method of manufacturing a graphene laminated structure includes plasma-treating a surface of a hexagonal boron nitride sheet using a fluorine-based gas plasma, depositing the hexagonal boron nitride sheet on a graphene sheet, and forming an insulating layer on a surface of the surface-treated hexagonal boron nitride sheet.

Abstract translation: 制造石墨烯层压结构的方法包括使用氟系气体等离子体对六方氮化硼片的表面进行等离子体处理，将六方晶系氮化硼片沉积在石墨烯片上，在表面上形成绝缘层 处理的六方氮化硼片。