公开(公告)号：US10790176B2

公开(公告)日：2020-09-29

申请号：US16012045

申请日：2018-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-Sik Bae ,  Hang-Ryong Lim ,  Se-Won Ko ,  Yoon-Mi Lee ,  Jin-Ho Kim ,  Jung-Dae Park ,  Min-Seon Lee ,  Yeong-Cheol Lee

IPC: H01L21/67 ,  H01L21/673

Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.

公开(公告)号：US20190131152A1

公开(公告)日：2019-05-02

申请号：US16012045

申请日：2018-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-Sik Bae ,  Hang-Ryong Lim ,  Se-Won Ko ,  Yoon-Mi Lee ,  Jin-Ho Kim ,  Jung-Dae Park ,  Min-Seon Lee ,  Yeong-Cheol Lee

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67253 ,  H01L21/67248 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.