公开(公告)号：US20190131152A1

公开(公告)日：2019-05-02

申请号：US16012045

申请日：2018-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-Sik Bae ,  Hang-Ryong Lim ,  Se-Won Ko ,  Yoon-Mi Lee ,  Jin-Ho Kim ,  Jung-Dae Park ,  Min-Seon Lee ,  Yeong-Cheol Lee

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67253 ,  H01L21/67248 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.

公开(公告)号：US10790176B2

公开(公告)日：2020-09-29

申请号：US16012045

申请日：2018-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-Sik Bae ,  Hang-Ryong Lim ,  Se-Won Ko ,  Yoon-Mi Lee ,  Jin-Ho Kim ,  Jung-Dae Park ,  Min-Seon Lee ,  Yeong-Cheol Lee

IPC: H01L21/67 ,  H01L21/673

Abstract: A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.

公开(公告)号：US09528949B2

公开(公告)日：2016-12-27

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。

公开(公告)号：US20140270078A1

公开(公告)日：2014-09-18

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到该层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。