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公开(公告)号:US20170294430A1
公开(公告)日:2017-10-12
申请号:US15298586
申请日:2016-10-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jae-Woo SEO , Jin Tae KIM , Tae Joong SONG , Hyoung-Suk OH , Keun Ho LEE , Dal Hee LEE , Sung We CHO
IPC: H01L27/02 , H01L23/528 , H03K19/177 , H01L21/67 , H01L21/8234 , H01L23/522 , H01L27/088
Abstract: An integrated circuit including a first standard cell including, first transistors, the first transistors being first unfolded transistors, a first metal pin, a second metal pin, and a third metal pin on a first layer, the first metal pin and the second metal pin having a first minimum metal center-to-metal center pitch therebetween less than or equal to 80 nm, a fourth metal pin and a fifth metal pin at a second layer, the fourth metal pin and the fifth metal pin extending in a second direction, the second direction being perpendicular to the first direction, a first via between the first metal pin and the fourth metal pin, and a second via between the third metal pin and the fifth metal pin such that a first via center-to-via center space between the first via and the second via is greater than double the first minimum metal center-to-metal center pitch.