Abstract:
The inventive concept provides apparatuses and methods for monitoring semiconductor fabrication processes in real time using polarized light. In some embodiments, the apparatus comprises a light source configured to generate light, a beam splitter configured to reflect the light toward the wafer being processed, an objective polarizer configured to polarize the light reflected toward the wafer and to allow light reflected by the wafer to pass therethrough, a blaze grating configured to separate light reflected by the wafer according to wavelength, an array detector configured to detect the separated light and an analyzer to analyze the three-dimensional profile of the structure/pattern being formed in the wafer.
Abstract:
The present disclosure relates to an electronic device with a display device having enhanced display power consumption. The electronic device includes: a housing; a transparent member disposed in at least a portion of the housing, and includes an upper surface and a lower surface; a first anti-reflection layer coupled to the upper surface of the transparent member; and a display panel coupled to at least a portion of the lower surface of the transparent member by a visually transparent adhesive member, and housed in the housing. The display panel includes: a polarizing film layer coupled to the adhesive member and including an upper surface and lower surface; a light emitting layer disposed under the lower surface of the polarizing film layer; and a second anti-reflection layer disposed on the lower surface of the polarizing film layer between the lower surface of the polarizing film layer and the light emitting layer.
Abstract:
The inventive concept provides apparatuses and methods for monitoring semiconductor fabrication processes in real time using polarized light. In some embodiments, the apparatus comprises a light source configured to generate light, a beam splitter configured to reflect the light toward the wafer being processed, an objective polarizer configured to polarize the light reflected toward the wafer and to allow light reflected by the wafer to pass therethrough, a blaze grating configured to separate light reflected by the wafer according to wavelength, an array detector configured to detect the separated light and an analyzer to analyze the three-dimensional profile of the structure/pattern being formed in the wafer.
Abstract:
A method and apparatus for providing a public transportation service in a communication system includes transmitting a signal representing an existence of a passenger at a particular stop terminal, and transmitting a signal representing information on a number of vehicles at to the stop terminal for selection by a user.
Abstract:
A method and apparatus for providing a public transportation service in a communication system includes transmitting a signal representing an existence of a passenger at a particular stop terminal, and transmitting a signal representing information on a number of vehicles at to the stop terminal for selection by a user.