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公开(公告)号:US10886224B2
公开(公告)日:2021-01-05
申请号:US16561340
申请日:2019-09-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Vassilios Gerousis , Rwik Sengupta , Joon Goo Hong , Kevin Michael Traynor
IPC: H01L23/528 , H01L23/522
Abstract: A tap cell configured to enable electrical connection from a buried power rail of an integrated circuit to a power distribution network includes. The tap cell includes a buried power rail layer including VDD and VSS power supply lines, insulating layers and metal layers alternately arranged on the buried power rail layer, a first power supply interconnect in metal layer M1 or higher electrically coupled to the VDD power supply line, and a second power supply interconnect in metal layer M1 or higher electrically connected to the VSS power supply line. The first power supply interconnect and the second power supply interconnect are configured to be electrically connected to the power distribution network, and the VDD and VSS power supply lines are configured to supply power from the power distribution network to the buried power rail of the integrated circuit. The tap cell is free of any active semiconductor devices.
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公开(公告)号:US11552067B2
公开(公告)日:2023-01-10
申请号:US16853535
申请日:2020-04-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Vassilios Gerousis , Rwik Sengupta , Joon Goo Hong , Kevin Traynor , Tanya Abaya , Dharmendar Palle , Mark S. Rodder
IPC: H01L23/528 , H01L27/02 , G06F30/392
Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
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公开(公告)号:US11158738B2
公开(公告)日:2021-10-26
申请号:US16548209
申请日:2019-08-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wei-E Wang , Mark Rodder , Vassilios Gerousis
IPC: H01L29/78 , H01L27/12 , H01L29/786 , H01L29/66
Abstract: A method of forming a stacked field effect transistor (FET) circuit is provided. The method includes providing a first wafer and a second wafer, forming a first dielectric layer on a surface of the first wafer, forming a second dielectric layer on a surface of the second wafer, and bonding the first wafer to the second wafer at the first dielectric layer and the second dielectric layer.
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公开(公告)号:US20210183814A1
公开(公告)日:2021-06-17
申请号:US16861029
申请日:2020-04-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wei-E Wang , Mark S. Rodder , Vassilios Gerousis
IPC: H01L25/065 , H01L23/00
Abstract: A method of manufacturing a three-dimensional semiconductor device includes forming a bi-layer sacrificial stack on a top wafer and a bottom wafer each including a series of interconnects in a dielectric substrate. The bi-layer sacrificial stack includes a second sacrificial layer on a first sacrificial layer. The method also includes selectively etching the second sacrificial layers to form a first pattern of projections on the top wafer and a second pattern of projections on the bottom wafer. The first pattern of projections is configured to mesh with the second pattern of projections. The method also includes positioning the top wafer on the bottom wafer and releasing the top wafer such that engagement between the first pattern of projections and the second pattern of projections self-aligns the plurality of interconnects of the top wafer with the plurality of interconnects of the bottom wafer within a misalignment error.
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公开(公告)号:US20240379653A1
公开(公告)日:2024-11-14
申请号:US18782939
申请日:2024-07-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Vassilios Gerousis , Rwik Sengupta , Joon Goo Hong , Kevin Traynor , Tanya Abaya , Dharmendar Palle , Mark S. Rodder
IPC: H01L27/02 , G06F30/392 , H01L23/528
Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
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公开(公告)号:US11189600B2
公开(公告)日:2021-11-30
申请号:US16861029
申请日:2020-04-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wei-E Wang , Mark S. Rodder , Vassilios Gerousis
IPC: H01L25/065 , H01L23/532 , H01L23/00
Abstract: A method of manufacturing a three-dimensional semiconductor device includes forming a bi-layer sacrificial stack on a top wafer and a bottom wafer each including a series of interconnects in a dielectric substrate. The bi-layer sacrificial stack includes a second sacrificial layer on a first sacrificial layer. The method also includes selectively etching the second sacrificial layers to form a first pattern of projections on the top wafer and a second pattern of projections on the bottom wafer. The first pattern of projections is configured to mesh with the second pattern of projections. The method also includes positioning the top wafer on the bottom wafer and releasing the top wafer such that engagement between the first pattern of projections and the second pattern of projections self-aligns the plurality of interconnects of the top wafer with the plurality of interconnects of the bottom wafer within a misalignment error.
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公开(公告)号:US12080703B2
公开(公告)日:2024-09-03
申请号:US18048186
申请日:2022-10-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Vassilios Gerousis , Rwik Sengupta , Joon Goo Hong , Kevin Traynor , Tanya Abaya , Dharmendar Palle , Mark S. Rodder
IPC: H01L27/02 , G06F30/392 , H01L23/528
CPC classification number: H01L27/0207 , G06F30/392 , H01L23/5286
Abstract: A semiconductor cell block includes a series of layers arranged in a stack. The layers include one or more first layers each having a first height and one or more second layers each having a second height. The second height is larger than the first height, and the second height is a non-integer multiple of the first height. The semiconductor cell block also includes a first semiconductor logic cell having a first cell height in one of the series of layers, and a second semiconductor logic cell having a second cell height in one of the series of layers. The second cell height is larger than the first cell height, and the second cell height is a non-integer value multiple of the first cell height.
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公开(公告)号:US11605574B2
公开(公告)日:2023-03-14
申请号:US17189777
申请日:2021-03-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wei-E Wang , Mark S. Rodder , Vassilios Gerousis
IPC: H01L23/367 , H01L23/373 , H01L27/06 , H01L25/065 , H01L23/522
Abstract: A monolithic three-dimensional integrated circuit including a first device, a second device on the first device, and a thermal shield stack between the first device and the second device. The thermal shield stack includes a thermal retarder portion having a low thermal conductivity in a vertical direction, and a thermal spreader portion having a high thermal conductivity in a horizontal direction. The thermal shield stack of the monolithic three-dimensional integrated circuit includes only dielectric materials.
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公开(公告)号:US20210183729A1
公开(公告)日:2021-06-17
申请号:US17189777
申请日:2021-03-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wei-E Wang , Mark S. Rodder , Vassilios Gerousis
IPC: H01L23/367 , H01L23/373 , H01L27/06 , H01L25/065 , H01L23/522
Abstract: A monolithic three-dimensional integrated circuit including a first device, a second device on the first device, and a thermal shield stack between the first device and the second device. The thermal shield stack includes a thermal retarder portion having a low thermal conductivity in a vertical direction, and a thermal spreader portion having a high thermal conductivity in a horizontal direction. The thermal shield stack of the monolithic three-dimensional integrated circuit includes only dielectric materials.
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公开(公告)号:US10811415B2
公开(公告)日:2020-10-20
申请号:US16298887
申请日:2019-03-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Rwik Sengupta , Joon Goo Hong , Vassilios Gerousis , Mark S. Rodder
IPC: H01L27/092 , H01L23/528 , H01L29/66 , H01L21/8238 , H01L29/78
Abstract: According to some example embodiments of the present disclosure, a semiconductor device includes: a substrate; a first semiconductor layer over the substrate, the first semiconductor layer being a first type of semiconductor device; and a second semiconductor layer over the substrate and the first semiconductor layer, the second semiconductor layer being the first type of semiconductor device, wherein a first portion of the first semiconductor layer overlaps the second semiconductor layer when viewed in a direction perpendicular to a plane of the substrate and a second portion of the first semiconductor layer is laterally offset from the second semiconductor layer when viewed in the direction perpendicular to the plane of the substrate.
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