公开(公告)号：US20200064276A1

公开(公告)日：2020-02-27

申请号：US16285548

申请日：2019-02-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： MYUNG-JUN LEE ,  Ken Ozawa ,  Wook-rae Kim ,  Gwang-Sik Park ,  Ji-hoon Kang ,  Kwang-Soo Kim

IPC: G01N21/95 ,  G06T5/50 ,  G06T7/00 ,  H04N5/372 ,  H01L21/67 ,  H01L21/66

Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.

公开(公告)号：US09546772B2

公开(公告)日：2017-01-17

申请号：US14601234

申请日：2015-01-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang-soo Kim ,  Wook-rae Kim ,  Tae-joong Kim ,  Byeong-hwan Jeon

IPC: G02B3/00 ,  F21V5/04 ,  H01L21/66 ,  G01N21/88

CPC classification number: F21V5/04 ,  G01N21/8806 ,  G02B2003/0093 ,  H01L22/12

Abstract: A rod lens for a lighting apparatus and a lighting apparatus including the rod lens are disclosed. The rod lens having a rectangular rod structure extends lengthwise and includes a first end and a second end opposing each other. The first end is a light incident surface and formed of one continuous surface. The second end is a light exit surface and formed of a plurality of separated surfaces.

Abstract translation: 公开了一种用于照明装置的棒状透镜和包括棒状透镜的照明装置。 具有矩形杆结构的棒状透镜纵向延伸并且包括彼此相对的第一端和第二端。 第一端是一个光入射表面，由一个连续表面形成。 第二端是光出射面，由多个分离面形成。

公开(公告)号：US10955360B2

公开(公告)日：2021-03-23

申请号：US16285548

申请日：2019-02-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myung-jun Lee ,  Ken Ozawa ,  Wook-rae Kim ,  Gwang-sik Park ,  Ji-hoon Kang ,  Kwang-soo Kim

IPC: G06T7/00 ,  G01N21/95 ,  G06T5/50 ,  H04N5/372 ,  H01L21/66 ,  H01L21/67

Abstract: Systems and methods related to a structured illumination (SI)-based inspection apparatus are described. The SI-based inspection apparatus may be capable of accurately inspecting an inspection object in real time with high resolution, while reducing the loss of light. Also described are an inspection method, and a semiconductor device fabrication method including the SI-based inspection method. The inspection apparatus may include a light source configured to generate and output a light beam, a phase shifting grating (PSG) configured to convert the light beam from the light source into the SI, a beam splitter configured to cause the SI to be incident on an inspection object and output a reflected beam from the inspection object, a stage capable of moving the inspection object and on which the inspection object is arranged, and a time-delayed integration (TDI) camera configured to capture images of the inspection object by detecting the reflected beam.