公开(公告)号：US10332762B2

公开(公告)日：2019-06-25

申请号：US15172740

申请日：2016-06-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-hoo Kim ,  Il-sang Lee ,  In-gi Kim ,  Kyoung-hwan Kim ,  Hyo-san Lee ,  Sang-won Bae ,  Tae-hong Kim ,  Yong-jun Choi

IPC: H01L21/67

Abstract: A chemical liquid supply apparatus includes a nozzle unit including a nozzle arm and an injection nozzle mounted in an end of the nozzle arm, a chemical liquid supply unit including a first chemical liquid tank accommodating a first chemical liquid and a second chemical liquid tank accommodating a second chemical liquid, and supplying the first chemical liquid and the second chemical liquid to the nozzle unit, and a mixer unit provided in the nozzle unit and discharging a process fluid by mixing the first chemical liquid and the second chemical liquid, wherein the mixer unit includes an in-line mixer mixing the first chemical liquid and the second chemical liquid that are continually injected from the chemical liquid supply unit, and a mixer pipe extending from the in-line mixer to the injection nozzle.