公开(公告)号：US20180164227A1

公开(公告)日：2018-06-14

申请号：US15800338

申请日：2017-11-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taejoong KIM ,  Kwang Soo KIM ,  lwa YOICHIRO ,  Byeonghwan JEON ,  Yougduk KIM ,  Wansung PARK ,  Tae-Heung AHN ,  Jaechol JOO

IPC: G01N21/94 ,  G01B11/06

CPC classification number: G01N21/94 ,  G01B11/06 ,  G01N21/9501 ,  G01N21/956

Abstract: Disclosed is a substrate inspection system. The substrate inspection system comprises a substrate inspection apparatus that inspects a substrate by irradiating light thereto. The substrate inspection apparatus comprises a light source to irradiate light onto the substrate, a detector to receive light from the substrate, and a controller to control an inspection mode of the substrate inspection apparatus by controlling the light source and the detector. The inspection mode comprises a first inspection mode to inspect whether a particle is present on the substrate and a second inspection mode to inspect a thickness of the substrate.