公开(公告)号：US20200020716A1

公开(公告)日：2020-01-16

申请号：US16251337

申请日：2019-01-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jun Hyoung KIM ,  Kwang Soo KIM ,  Geun Won LIM

IPC: H01L27/11582 ,  H01L27/11573 ,  H01L27/1157 ,  H01L27/11565 ,  H01L23/522 ,  H01L23/528 ,  H01L21/28

Abstract: A semiconductor memory device includes a peripheral circuit structure including a peripheral circuit insulating layer, a middle connection structure on the peripheral circuit insulating layer, the middle connection structure including a middle connection insulating layer, and a bottom surface of the middle connection insulating layer is in contact with a top surface of the peripheral circuit insulating layer, stack structures on sides of the middle connection structure, and channel structures extending vertically through each of the stack structures, wherein at least one side surface of the middle connection insulating layer is an inclined surface, a lateral sectional area of the middle connection insulating layer decreasing in an upward direction oriented away from the peripheral circuit insulating layer.

公开(公告)号：US20190393240A1

公开(公告)日：2019-12-26

申请号：US16268642

申请日：2019-02-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwang Soo KIM ,  Si Wan Kim ,  Jun Hyoung Kim ,  Kyoung Taek Oh ,  Bong Hyun Choi

IPC: H01L27/11582 ,  H01L27/11565 ,  H01L27/11573 ,  H01L27/1157 ,  H01L29/06 ,  H01L29/423

Abstract: A three-dimensional semiconductor memory device includes: a base substrate; a gate stack structure disposed on the base substrate, and including gate electrodes stacked in a direction substantially perpendicular to a top surface of the base substrate; a penetration region penetrating through the gate stack structure and surrounded by the gate stack structure; and vertical channel structures passing through the gate stack structure. The lowermost gate electrodes among the gate electrodes are spaced apart from each other, and a portion of at least one of the lowermost gate electrodes has a shape bent toward the penetration region.

公开(公告)号：US20180358374A1

公开(公告)日：2018-12-13

申请号：US15868084

申请日：2018-01-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang Soo KIM ,  Hyun Suk KIM ,  Soon Hyuk HONG ,  Doo Hee HWANG

IPC: H01L27/11582 ,  H01L29/423 ,  H01L29/10 ,  H01L23/532 ,  H01L23/528 ,  H01L27/11565 ,  H01L29/792

CPC classification number: H01L27/11582 ,  H01L23/5283 ,  H01L23/53271 ,  H01L27/11565 ,  H01L27/11568 ,  H01L27/11573 ,  H01L29/1037 ,  H01L29/4234 ,  H01L29/7926

Abstract: A vertical memory device includes a gate structure including a plurality of gate electrode layers stacked on a substrate, a plurality of channel structures penetrating through the gate structure and extending in a direction perpendicular to an upper surface of the substrate, a common source line penetrating the gate structure and extending in a first direction, a metal line extended above the common source line in the first direction, and a plurality of connection portions interposed between the metal line and the common source line.

公开(公告)号：US20180164227A1

公开(公告)日：2018-06-14

申请号：US15800338

申请日：2017-11-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taejoong KIM ,  Kwang Soo KIM ,  lwa YOICHIRO ,  Byeonghwan JEON ,  Yougduk KIM ,  Wansung PARK ,  Tae-Heung AHN ,  Jaechol JOO

IPC: G01N21/94 ,  G01B11/06

CPC classification number: G01N21/94 ,  G01B11/06 ,  G01N21/9501 ,  G01N21/956

Abstract: Disclosed is a substrate inspection system. The substrate inspection system comprises a substrate inspection apparatus that inspects a substrate by irradiating light thereto. The substrate inspection apparatus comprises a light source to irradiate light onto the substrate, a detector to receive light from the substrate, and a controller to control an inspection mode of the substrate inspection apparatus by controlling the light source and the detector. The inspection mode comprises a first inspection mode to inspect whether a particle is present on the substrate and a second inspection mode to inspect a thickness of the substrate.

公开(公告)号：US20180144998A1

公开(公告)日：2018-05-24

申请号：US15626302

申请日：2017-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Won PARK ,  Jeong-Su HA ,  Sangbong PARK ,  Kwang Soo KIM ,  Byeong Kyu CHA

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/95 ,  G06T7/00 ,  H04N7/18

CPC classification number: H01L22/20 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8887 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01L22/12 ,  H04N7/181

Abstract: Disclosed are an inspection apparatus and a method of manufacturing a semiconductor device using the same. The inspection apparatus includes a stage configured to receive a substrate, an objective lens on the stage and configured to enlarge the substrate optically, an ocular lens on the objective lens and configured to form at its image plane an image of the substrate, and a plurality of sensors above the ocular lens and in the image plane of the ocular lens.

公开(公告)号：US20170258286A1

公开(公告)日：2017-09-14

申请号：US15606497

申请日：2017-05-26

Applicant: SAMSUNG ELECTRONICS CO. LTD.

Inventor： Kwang Soo KIM ,  Deok Jin Kim ,  Myung Bae Bang ,  Sung Gu Lee ,  Byung Ryel In ,  Young Kwan Kim

IPC: A47L9/22 ,  H02K1/27 ,  H02K7/14 ,  H02K1/24 ,  H02K9/06

CPC classification number: A47L9/22 ,  F04D29/263 ,  H02K1/246 ,  H02K1/278 ,  H02K7/14 ,  H02K9/06

Abstract: A motor apparatus having a high efficiency and reducing manufacturing cost by using a cost effective ferrite permanent magnet includes a rotatable shaft, a fan connected to one side of the shaft to generate a flow of air, a stator including stator cores arranged in a circumferential direction, and a coil wound around the stator core, and a rotor disposed at an inside of the stator and provided in a form of a cylinder having a passage allowing the shaft to pass through the rotor includes a rotor core provided with a protrusion structure and one or more ferrite magnets coupled to the rotor core to provide a magnetic force. By using a ferrite magnet, when compared to a conventional universal motor, a superior efficiency is obtained, and when compared to a BLDC motor using a Nd magnet, a low cost BLDC motor is implemented.

公开(公告)号：US20150357871A1

公开(公告)日：2015-12-10

申请号：US14729466

申请日：2015-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Kwan KIM ,  Byung Ryel IN ,  Deok Jin KIM ,  Kwang Soo KIM ,  Jong Jin PARK ,  Myung Bae BANK ,  Keung Young YOON

IPC: H02K1/28 ,  H02K15/03 ,  B29C65/48 ,  H02K7/04

CPC classification number: H02K1/28 ,  B29C65/48 ,  H02K1/2733 ,  H02K1/30 ,  H02K7/04 ,  H02K15/03

Abstract: A motor assembly having an internal channel passing an interior of a rotor, and a method for producing the same are provided. The motor assembly includes an adhesive flowing along the internal channel, and the rotor can be firmly coupled and improving durability and production efficiency of the rotor.

Abstract translation: 提供具有通过转子内部的内部通道的电动机组件及其制造方法。 马达组件包括沿着内部通道流动的粘合剂，并且转子可以牢固地联接并提高转子的耐久性和生产效率。

公开(公告)号：US20200058671A1

公开(公告)日：2020-02-20

申请号：US16270570

申请日：2019-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun Hyoung KIM ,  Kwang Soo KIM ,  Seok Cheon BAEK ,  Geun Won LIM

IPC: H01L27/11575 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11548 ,  H01L27/11529 ,  H01L27/1157 ,  H01L27/11582 ,  H01L27/11573

Abstract: A vertical memory device includes a substrate having a peripheral circuit structure, first gate patterns having first gate pad regions stacked vertically from the substrate, vertical channel structures penetrating the first gate patterns, first gate contact structures each extending vertically to a corresponding first gate pad region, mold patterns stacked vertically from the substrate, the mold patterns each being positioned at the same height from the substrate with a corresponding gate pattern, peripheral contact structures penetrating the mold patterns to be connected to the peripheral circuit structure, a first block separation structure disposed between the first gate contact structures and the peripheral contact structures, and a first peripheral circuit connection wiring extending across the first block separation structure to connect one of the first gate contact structures to one of the peripheral contact structures.

公开(公告)号：US20230184535A1

公开(公告)日：2023-06-15

申请号：US17969200

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Woo LEE ,  Wook Rae KIM ,  Kwang Soo KIM ,  Myung Jun LEE ,  Seo Yeon JEONG ,  Sung Ho JANG

IPC: G01B9/02055 ,  G01B9/02015 ,  G01B9/02 ,  G01B9/02001

CPC classification number: G01B9/02063 ,  G01B9/0203 ,  G01B9/02083 ,  G01B9/02011 ,  H01L22/12

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

公开(公告)号：US20170116727A1

公开(公告)日：2017-04-27

申请号：US15247537

申请日：2016-08-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwang Soo KIM ,  Sangbong Park ,  Byeonghwan Jeon ,  Youngduk Kim

IPC: G06T7/00 ,  G02B13/00 ,  G02B27/14 ,  H01L21/66 ,  G01N21/95 ,  G01N21/956 ,  H01L21/67 ,  G02B27/09 ,  H04N5/247

CPC classification number: G06T7/0008 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2201/061 ,  G02B13/0095 ,  G02B27/0988 ,  G02B27/14 ,  G06T7/001 ,  G06T2207/20224 ,  G06T2207/30148 ,  H01L21/67276 ,  H01L22/12 ,  H04N5/247

Abstract: An inspection apparatus includes a light source device providing incident light to a substrate, an objective lens receiving reflection light reflected from the substrate, a light splitting device disposed over the objective lens, first and second optical sensors disposed at both sides of the light splitting device, respectively, and first and second spatial filters disposed between the first optical sensor and the substrate and between the second optical sensor and the substrate, respectively. The first and second spatial filters transmit the reflection light in different forms from each other.