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公开(公告)号:US20240363625A1
公开(公告)日:2024-10-31
申请号:US18422471
申请日:2024-01-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Beom Jin Park , Myung Gil Kang , Dong Won Kim , Young Gwon Kim , Soo Jin Jeong
IPC: H01L27/088 , H01L29/06 , H01L29/423 , H01L29/775 , H01L29/786
CPC classification number: H01L27/088 , H01L29/0673 , H01L29/42392 , H01L29/775 , H01L29/78696
Abstract: A semiconductor device is provided. The semiconductor includes a substrate having a first conductivity type; a well region having a second conductivity type in the substrate; an impurity implantation region having the first conductivity type in the well region; an element separation pattern in the substrate; a first fin pattern defined by the element separation pattern in the impurity implantation region; a second fin pattern defined by the element separation pattern in the well region; and a third fin pattern defined by the element separation pattern in the substrate, wherein the first fin pattern is a single fin, and an entirety of a lower boundary of the impurity implantation region is in contact with the well region.