公开(公告)号：US20170069513A1

公开(公告)日：2017-03-09

申请号：US15168713

申请日：2016-05-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Min OH ,  Mi-Hyun PARK ,  ln-Gi KIM ,  Ji-Hoon JEONG ,  Seok-Hoon KIM ,  Hyo-San LEE

IPC: H01L21/67 ,  B08B3/08 ,  C11D7/34 ,  C11D11/00 ,  C11D7/32 ,  H01L21/02 ,  B08B3/14

CPC classification number: H01L21/67051 ,  C11D7/265 ,  C11D7/28 ,  C11D7/3209 ,  C11D7/34 ,  C11D7/5004 ,  C11D11/0047 ,  H01L21/02057 ,  H01L21/67017

Abstract: A semiconductor cleaning process system includes a process chamber configured to hold a semiconductor substrate, a cleaning solution supply unit configured to provide a cleaning solution to the process chamber, the cleaning solution including an organic fluoride, an organic acid and an organic solvent, a recycling unit configured to collect the cleaning solution discharged from the process chamber, a first concentration measuring unit configured to evaluate a fluorine concentration of a collected solution in the recycling unit, and a sub-cleaning solution supply unit configured to provide the organic fluoride to the cleaning solution supply unit based on the fluorine concentration evaluated by the first concentration measuring unit.

Abstract translation: 半导体清洗处理系统包括：配置成保持半导体衬底的处理室，构造成向处理室提供清洁溶液的清洗溶液供应单元，包括有机氟化物，有机酸和有机溶剂的清洗溶液，循环利用 被配置为收集从处理室排出的清洗溶液的单元，被配置为评估回收单元中的收集溶液的氟浓度的第一浓度测量单元和被配置为将有机氟化物提供给清洁的辅助清洁溶液供应单元 溶液供应单元，其基于由第一浓度测量单元评估的氟浓度。