HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS

    公开(公告)号:US20240255842A1

    公开(公告)日:2024-08-01

    申请号:US18411690

    申请日:2024-01-12

    CPC classification number: G03F1/68

    Abstract: A hardmask composition, a hardmask layer including a cured product of the aforementioned hardmask composition, and a method of forming patterns that includes using the hardmask layer including a cured product of the aforementioned hardmask composition, the hardmask composition including a solvent and a compound represented by Chemical Formula 1:

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