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公开(公告)号：US5739654A
公开(公告)日：1998-04-14
申请号：US715826
申请日：1996-09-19
IPC分类号： G05B19/401 , G05B13/00
CPC分类号： G05B19/401 , G05B2219/41247 , G05B2219/49113 , G05B2219/49135
摘要： A servo controlled tool and stage positioning system. A circuit in the tool positioning servo control circuit removes unwanted glitches. Glitches are generated by servo control DACs when the servo is at rest. The circuit selectively blocks these glitches from being passed to the tool positioning circuit only when the stage is at rest.
摘要翻译： 伺服控制工具和平台定位系统。 刀具定位伺服控制电路中的电路消除不必要的毛刺。 当伺服静止时，伺服控制DAC会产生毛刺。 该电路只有在舞台静止时才有选择地阻止这些毛刺被传递到工具定位电路。
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公开(公告)号：US06456019B1
公开(公告)日：2002-09-24
申请号：US09775762
申请日：2001-02-03
IPC分类号： G09G104
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/304 , H01J37/3174 , H01J2237/065
摘要： A method and a apparatus are provided for operating an E-beam system including an E-beam source for generating an E-beam directed along a column axis and an electrode aligned with the column axis direct the E-beam towards means for measuring the E-beam. A signal proportional to leakage current emitted from the E-beam is generated. When the result of a comparison with a desired value is excessive, an excess leakage signal is generated. The excess leakage signal can be provided as an emergency output signal and/or produce an OFF signal for stopping production of the E-beam by turning OFF voltage/power sources for producing the E-beam in response to the excess leakage signal. Preferably, a filament is heated by an electric current and a cathode is bombarded with electrons from the filament to produce the E-beam. Then a filament control signal is employed for controlling the filament heating current.
摘要翻译： 提供了一种用于操作电子束系统的电子束系统的方法和装置，所述电子束系统包括用于产生沿着列轴线定向的电子束的电子束源和与所述列轴对准的电极，所述电子束系统将所述电子束指向用于测量所述E的装置 -光束。 产生与从电子束发射的泄漏电流成比例的信号。 当与期望值的比较结果过大时，产生过量的泄漏信号。 可以根据过量的泄漏信号，通过关闭用于产生电子束的电压/电源来提供过量的泄漏信号作为紧急输出信号和/或产生用于停止电子束的产生的OFF信号。 优选地，灯丝被电流加热，并且阴极被来自灯丝的电子轰击以产生电子束。 然后使用灯丝控制信号来控制灯丝加热电流。
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