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公开(公告)号:US20100065215A1
公开(公告)日:2010-03-18
申请号:US12585098
申请日:2009-09-03
申请人: Sang Jean Jeon , Yuri Tolmachev , Vasily Pashkovskiy , Kee Soo Park , Ju Hyun Lee , Su Ho Lee , Chan Yun Lee
发明人: Sang Jean Jeon , Yuri Tolmachev , Vasily Pashkovskiy , Kee Soo Park , Ju Hyun Lee , Su Ho Lee , Chan Yun Lee
IPC分类号: C23C16/513 , H01L21/3065
CPC分类号: H01J37/32357 , H01J37/321
摘要: A plasma generating apparatus including a plurality of plasma source modules. Each plasma source module includes a ferrite core having high magnetic permeability and a plasma channel through which plasma may pass. The plasma generating apparatus may effectively generate and uniformly distribute large-area and high-density plasma without a dielectric window.
摘要翻译: 一种等离子体发生装置,包括多个等离子体源模块。 每个等离子体源模块包括具有高磁导率的铁氧体磁芯和等离子体可通过的等离子体通道。 等离子体发生装置可以有效地产生并且均匀分布大面积和高密度的等离子体而不需要电介质窗口。