公开(公告)号：US09494065B2

公开(公告)日：2016-11-15

申请号：US13976328

申请日：2011-12-27

申请人： Sang-Yun Lee ,  Myung Keun Noh ,  Heaungshig Oh

发明人： Sang-Yun Lee ,  Myung Keun Noh ,  Heaungshig Oh

IPC分类号： F01N3/08 ,  B01D53/32 ,  H01L21/67 ,  H05H1/24

CPC分类号： F01N3/0892 ,  B01D53/32 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2047 ,  B01D2258/0216 ,  B01D2259/818 ,  H01L21/67017 ,  H05H1/2406 ,  H05H2001/2456 ,  H05H2245/1215

摘要： Provided is an apparatus for processing exhaust fluid in which a fluid generated in a process chamber of an apparatus for manufacturing a semiconductor, a display panel, or a solar cell is ejected to the outside. The apparatus for processing exhaust fluid includes: a vacuum pump that is connected to the process chamber, vacuumizes the inside of the process chamber, and ejects the fluid generated in the process chamber to the outside; and a plasma reactor in which plasma is formed and the fluid generated in the process chamber decomposes, wherein the plasma reactor includes: an insulating conduit that is provided between the process chamber and the vacuum pump and provides a space in which the fluid decomposes; at least one electrode unit that is provided on the outer circumferential surface of the conduit and receives a voltage to form the plasma; a buffer unit that is formed of an electrically conductive elastic substance and is disposed between the conduit and the electrode unit to attach the conduit and the electrode unit closely together; and an external pipe into which the conduit, electrode unit and buffer unit are inserted with sealing flanges provided on both end portions of the conduit and external pipe to seal a space between the conduit and the external pipe to prevent fluid process by-products from leaking out should the conduit crack or is damaged.

摘要翻译： 本发明提供一种处理废液的装置，其中在半导体制造装置，显示面板或太阳能电池的处理室中产生的流体喷射到外部。 用于处理废气流体的装置包括：真空泵，其连接到处理室，对处理室的内部进行真空化，并将处理室中产生的流体喷射到外部; 以及其中形成等离子体并且在处理室中产生的流体分解的等离子体反应器，其中等离子体反应器包括：设置在处理室和真空泵之间并提供流体分解的空间的绝缘导管; 至少一个电极单元，其设置在所述导管的外周面上并接收电压以形成所述等离子体; 缓冲单元，其由导电弹性物质形成并且设置在所述导管和所述电极单元之间，以将所述导管和所述电极单元紧密地附接在一起; 以及管道，电极单元和缓冲单元插入其中的外管，其中设置在导管和外管的两端部上的密封凸缘以密封导管和外管之间的空间，以防止流体加工副产物泄漏 如果管道破裂或损坏。

公开(公告)号：US20140004009A1

公开(公告)日：2014-01-02

申请号：US13976328

申请日：2011-12-27

申请人： Sang-Yun Lee ,  Myung Keun Noh ,  Heaungshig Oh

发明人： Sang-Yun Lee ,  Myung Keun Noh ,  Heaungshig Oh

IPC分类号： F01N3/08

CPC分类号： F01N3/0892 ,  B01D53/32 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/2047 ,  B01D2258/0216 ,  B01D2259/818 ,  H01L21/67017 ,  H05H1/2406 ,  H05H2001/2456 ,  H05H2245/1215

摘要： Provided is an apparatus for processing exhaust fluid in which a fluid generated in a process chamber of an apparatus for manufacturing a semiconductor, a display panel, or a solar cell is ejected to the outside. The apparatus for processing exhaust fluid includes: a vacuum pump that is connected to the process chamber, vacuumizes the inside of the process chamber, and ejects the fluid generated in the process chamber to the outside; and a plasma reactor in which plasma is formed and the fluid generated in the process chamber decomposes, wherein the plasma reactor includes: an insulating conduit that is provided between the process chamber and the vacuum pump and provides a space in which the fluid decomposes; at least one electrode unit that is provided on the outer circumferential surface of the conduit and receives a voltage to form the plasma; and a buffer unit that is formed of an electrically conductive elastic substance and is disposed between the conduit and the electrode unit to attach the conduit and the electrode unit closely together.

摘要翻译： 本发明提供一种处理废液的装置，其中在半导体制造装置，显示面板或太阳能电池的处理室中产生的流体喷射到外部。 用于处理废气流体的装置包括：真空泵，其连接到处理室，对处理室的内部进行真空化，并将处理室中产生的流体喷射到外部; 以及其中形成等离子体并且在处理室中产生的流体分解的等离子体反应器，其中等离子体反应器包括：设置在处理室和真空泵之间并提供流体分解的空间的绝缘导管; 至少一个电极单元，其设置在所述导管的外周面上并接收电压以形成所述等离子体; 以及缓冲单元，其由导电弹性物质形成，并且设置在导管和电极单元之间，以将导管和电极单元紧密地连接在一起。

公开(公告)号：US07611340B2

公开(公告)日：2009-11-03

申请号：US11878665

申请日：2007-07-26

申请人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

发明人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

IPC分类号： F04C18/18 ,  F04C25/02

CPC分类号： F04C18/16 ,  F04C18/084 ,  F04C18/086 ,  F04C18/126 ,  F04C23/005 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2280/02 ,  F05C2253/20

摘要： A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.

摘要翻译： 公开了一种包括根转子和螺杆转子的复式干式真空泵，用于在处理室中以真空状态制造半导体和/或显示器，并且将在制造过程中产生的气态材料和/或副产物排放到工艺外部 房间。 泵可以提供高的气体压缩传递效率，以便在气体材料和/或副产物排放时在处理室中形成真空和/或保持高的气体压缩传递效率。 根转子和螺杆转子之间的平衡可以防止在真空泵中产生的振动和噪声，并且与泵相关联的模制材料可以允许定子线圈被分离并且防止各种副产物从真空泵流出。