公开(公告)号：US07837844B2

公开(公告)日：2010-11-23

申请号：US11115911

申请日：2005-04-26

申请人： Sanjay V. Patel ,  Todd E. Mlsna ,  Erno Klaasen

发明人： Sanjay V. Patel ,  Todd E. Mlsna ,  Erno Klaasen

IPC分类号： G01N27/327 ,  G01N27/30

CPC分类号： G01N27/226

摘要： The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.

摘要翻译： 本发明涉及化学检测领域。 更具体地，本发明提供了可以通过吸附或吸收目标分析物到化学感测材料中或在化学感测材料中来检测存在于环境中的各种目标分析物（例如，化学品和/或生物材料）的装置，使得电参数 （例如，电容，电阻等）以与通过化学感测材料涂覆的感测电极对相关联的电路可检测的方式改变。 这里，本发明的器件的感测电极对通过用于将电极从衬底放置的一个或多个柱悬置在惰性衬底上。

公开(公告)号：US06864692B1

公开(公告)日：2005-03-08

申请号：US10177133

申请日：2002-06-20

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

IPC分类号： G01N27/22 ,  G01R27/26 ,  H01G5/16

CPC分类号： G01N27/227

摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

摘要翻译： 公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。 反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。 当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。 这导致电容降低。 当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。 这导致电容增加。 包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

公开(公告)号：US07393740B2

公开(公告)日：2008-07-01

申请号：US11725609

申请日：2007-03-20

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

IPC分类号： H01L29/00 ,  H01L21/8244 ,  H01L21/8242 ,  H01L21/20

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US07489017B2

公开(公告)日：2009-02-10

申请号：US11542741

申请日：2006-10-02

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

IPC分类号： H01L29/00

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US06977511B2

公开(公告)日：2005-12-20

申请号：US11082634

申请日：2005-03-08

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

IPC分类号： G01N27/22 ,  G01R27/26 ,  H01G5/16

CPC分类号： G01N27/227

摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

摘要翻译： 公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。 反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。 当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。 这导致电容降低。 当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。 这导致电容增加。 包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。