公开(公告)号：US20170307976A1

公开(公告)日：2017-10-26

申请号：US15517505

申请日：2014-11-18

Applicant: Seagate Technology LLC

Inventor： XiaoMin YANG ,  Shuaigang XIAO ,  Kim Y. LEE ,  David S. KUO

IPC: G03F7/11 ,  G03F7/20 ,  G03F7/09

CPC classification number: G03F7/11 ,  B81C1/00031 ,  B81C2201/0149 ,  C08L53/00 ,  G03F7/0002 ,  G03F7/094 ,  G03F7/165 ,  G03F7/168 ,  G03F7/40 ,  G03F7/70 ,  H01L21/0274

Abstract: Provided herein is a method, including creating a first layer over a substrate, wherein the first layer is configured for directed self-assembly of a block copolymer thereover; creating a continuous second layer over the first layer by directed self-assembly of a block copolymer, wherein the second layer is also configured for directed self-assembly of a block copolymer thereover; and creating a third layer over the continuous second layer by directed self-assembly of a block copolymer. Also provided is an apparatus, comprising a continuous first layer comprising a thin film of a first, phase-separated block copolymer, wherein the first layer comprises a first chemoepitaxial template configured for directed self-assembly of a block copolymer thereon; and a second layer on the first layer, wherein the second layer comprises a thin film of a second, phase-separated block copolymer.