公开(公告)号：US20150262606A1

公开(公告)日：2015-09-17

申请号：US14728908

申请日：2015-06-02

Applicant: Seagate Technology LLC

Inventor： Shuaigang Xiao ,  XiaoMin Yang ,  ZhaoNing Yu ,  Yautzong Hsu

IPC: G11B5/855 ,  G11B5/74

CPC classification number: G11B5/855 ,  G03F7/0002 ,  G11B5/746 ,  H01L21/00 ,  H01L21/302 ,  Y10T428/24802 ,  Y10T428/24926

Abstract: Provided herein are apparatuses and methods, including patterning a first set of features in a servo zone to form a patterned servo zone while a first mask protects a data zone from the patterning. The first mask may be removed from the data zone. The apparatuses and methods may further include patterning a second set of features in the data zone to form a patterned data zone while a second mask protects the patterned servo zone from the patterning.

Abstract translation: 本文提供了装置和方法，包括在伺服区中图形化第一组特征以形成图案化的伺服区，而第一掩模保护数据区免受图案化。 可以从数据区域中删除第一个掩码。 装置和方法还可以包括在数据区中图形化第二组特征以形成图案化数据区，而第二掩模保护图案化的伺服区免受图案化。

公开(公告)号：US09928867B2

公开(公告)日：2018-03-27

申请号：US14728908

申请日：2015-06-02

Applicant: Seagate Technology LLC

Inventor： Shuaigang Xiao ,  XiaoMin Yang ,  ZhaoNing Yu ,  Yautzong Hsu

IPC: G11B5/855 ,  G11B5/74 ,  H01L21/00 ,  H01L21/302 ,  G03F7/00

CPC classification number: G11B5/855 ,  G03F7/0002 ,  G11B5/746 ,  H01L21/00 ,  H01L21/302 ,  Y10T428/24802 ,  Y10T428/24926

Abstract: Provided herein are apparatuses and methods, including patterning a first set of features in a servo zone to form a patterned servo zone while a first mask protects a data zone from the patterning. The first mask may be removed from the data zone. The apparatuses and methods may further include patterning a second set of features in the data zone to form a patterned data zone while a second mask protects the patterned servo zone from the patterning.