公开(公告)号：US10046371B2

公开(公告)日：2018-08-14

申请号：US14228562

申请日：2014-03-28

Applicant: Semes Co., Ltd.

Inventor： Eun-Sun Jung ,  Woo-Young Kim ,  Chan-youn Heo

IPC: F26B5/00 ,  B08B7/00 ,  B01D53/04 ,  F26B21/14 ,  H01L21/67 ,  F26B25/00 ,  G03F7/42

Abstract: The substrate treating apparatus includes a process chamber in which an organic solvent remaining on a substrate is dissolved by using a fluid, that is provided as a supercritical fluid, to dry the substrate and a recycling unit including a recycler separating the organic solvent from the fluid discharged from the process chamber to recycle the fluid. The recycler includes a column having a space in which an absorbent for absorbing the organic solvent is stored, a supply tube supplying the fluid discharged from the process chamber into the space of the column, a discharge tube discharging the fluid from which the organic solvent is separated in the column, a gas supply tube supplying a purge gas into the column so that the organic solvent is separated from the absorbent, and an exhaust tube exhausting the purge gas containing the organic solvent to the outside of the column.