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公开(公告)号：US10395915B2
公开(公告)日：2019-08-27
申请号：US14190534
申请日：2014-02-26
Applicant: Semes Co., Ltd.
Inventor： Se Won Lee , Yong Hee Lee , Jae Yong Kim
Abstract: Provided is a substrate treatment apparatus. The apparatus includes a chuck supporting a substrate and being rotatable, a container surrounding the chuck and collecting chemicals scattered due to rotations of the substrate, and a first spray nozzle spraying the chemicals to the substrate.
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