公开(公告)号：US20230037419A1

公开(公告)日：2023-02-09

申请号：US17815617

申请日：2022-07-28

Applicant: Semes Co., Ltd.

Inventor： Jangmi WOO ,  Kihoon CHOI ,  Younghoon JEONG ,  Myungjin KIM

IPC: B41J2/11 ,  B41J2/175 ,  B41J2/045 ,  B41J2/14

Abstract: An apparatus for supplying chemical liquid may include at least two ink jet heads, a reservoir for receiving a chemical liquid provided onto a substrate from each of the at least two ink jet heads, a chemical liquid for supplying member providing the chemical liquid to each of the at least two ink jet heads, and a chemical liquid collecting member for drawing and collecting a chemical liquid remained in each of the at least two ink jet heads. One path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via one of the at least two ink jet heads may be substantially the same as a length of another path the of chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via the other of the at least two ink jet heads.