摘要:
Methods of forming half-tone phase-shift masks include the steps of forming a series of layers on a face of a transparent substrate such as quartz. These layers include a phase-shift layer of MoSiON, a layer of opaque material (e.g., chrome) for blocking light on the phase-shift layer and a photoresist layer on the layer of opaque material. The photoresist layer is then patterned to define a mask having openings therein which expose the layer of opaque material. The layer of opaque material is then patterned using a wet etchant, to expose portions of the phase-shift layer. The patterned photoresist layer is then stripped and a cleaning step is then performed to remove residual defects and marks from the patterned layer of opaque material. The patterned layer of opaque material is then used as a mask during the step of anisotropically dry etching the phase-shift layer using a gas containing CF.sub.4 and O.sub.2, but not CHF.sub.3. The use of a gas containing CF.sub.4 and O.sub.2 inhibits parasitic sputtering of chrome from the patterned layer of opaque material onto the exposed portions of the face of the transparent substrate, during the dry etching step. In contrast, the use of a gas containing CHF.sub.3 and O.sub.2 during dry etching of the phase-shift layer may cause the formation of parasitic defects containing chrome on the face of the transparent substrate. These parasitic defects typically cause a reduction in yield when the phase-shift mask is used in the formation of integrated circuits.
摘要:
The present invention relates to a method for preparing polyarylene sulfide with a reduced free iodine content. More specifically, the method for preparing polyarylene sulfide includes: (a) polymerizing reactants including a diiodo aromatic compound and a sulfur compound to form a polyarylene sulfide; and (b) maintaining the polyarylene sulfide product at 100 to 260° C. for heat-setting. The preparation method of the present invention effectively reduces the free iodine content of the polyarylene sulfide to prevent potential corrosion of facilities for the subsequent process and improves the properties of the polyarylene sulfide product such as thermal stability, so the method can be usefully applied to industrial fields in regard to the preparation of polyarylene sulfide.
摘要:
A liquid crystal display apparatus includes a front cover on which an opening edge is formed, a display panel provided on a back of the front cover, a screen protector provided between the front cover and the display panel to protect the display panel, and a rear cover coupled to the back of the front cover. Thus, the liquid crystal display apparatus may have a simplified installation structure of the screen protector.
摘要:
A rear projector that can be made slim and compact and can prevent image reversal. The rear projector includes a cathode ray tube to scan light and generate an image, a projection lens unit to magnify and project the image generated by the cathode ray tube, a screen on which the projected image is formed, and a reflection optical system interposed between the projection lens unit and the screen to change a path of projected light. The cathode ray tube and the reflection optical system are arranged such that a raster direction of the cathode ray tube and a direction along which the image is formed on the screen are parallel or substantially parallel to each other.
摘要:
A developing device that attaches/detaches to/from a main body of an image forming apparatus includes a photosensitive drum, a charging roller to rotate while contacting the photosensitive drum to charge a surface of the photosensitive drum to a uniform potential, and a separating member to rotate between a first position where the charging roller is separated from the photosensitive drum and a second position where the charging roller contacts the photosensitive drum. The separating member includes a body into which a rotary shaft of the charging roller is inserted to be rotatable, and a contact portion extending from the body and contacting the surface of the photosensitive drum when the separating member is located at the first position so as to separate the charging roller from the photosensitive drum, wherein the contact portion includes a friction member including rubber.
摘要:
A developing cartridge includes an agitator including a pair of ribs to effectively force a toner to a center of a flexible agitator film. In the developing cartridge of an electrophotographic image forming apparatus including a housing containing the toner, a developing roller disposed such that a portion thereof is exposed to the housing, and the agitator which is provided in the housing and feeds the toner to the developing roller, the agitator includes a body, the flexible agitating film including a coupling groove and attached to the body, a hook provided on the body and inserted into the coupling groove, and the pair of ribs provided on the body.
摘要:
A display device usable outdoors includes a display part to form a picture thereon, a housing to accommodate the display part and having an opening through which the display part is mounted, a protecting member installed in the opening part of the housing to protect the display part, a heat exchanger mounted within the housing to cool down an inside of the housing, and a non-reflecting coating part disposed on the protecting member to prevent a drop in brightness of the display part due to solar light. Accordingly, the display device usable outdoors prevents a drop in the brightness and a rise in temperature of the display part.
摘要:
Provided are a projection optical system, a projection television, and a method of manufacturing a lens included in the projection optical system. The projection optical system includes lenses for projecting color beams onto a screen. A color filter layer, absorbing at least one of the color beams, is coated on the surface of at least one of the lenses.
摘要:
A flat display including a display main body to receive a display panel to display an image and a receiving member which is formed with receiving holes disposed at opposite lateral sides of the display main body.
摘要:
A developing cartridge includes an agitator including a pair of ribs to effectively force a toner to a center of a flexible agitator film. In the developing cartridge of an electrophotographic image forming apparatus including a housing containing the toner, a developing roller disposed such that a portion thereof is exposed to the housing, and the agitator which is provided in the housing and feeds the toner to the developing roller, the agitator includes a body, the flexible agitating film including a coupling groove and attached to the body, a hook provided on the body and inserted into the coupling groove, and the pair of ribs provided on the body.