公开(公告)号：US20130169113A1

公开(公告)日：2013-07-04

申请号：US13468441

申请日：2012-05-10

申请人： Seung Mo Lim ,  Yun Sung KANG ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Kyo Yeol LEE

发明人： Seung Mo Lim ,  Yun Sung KANG ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Kyo Yeol LEE

IPC分类号： H01L41/047 ,  H01L41/22

CPC分类号： H01L41/25 ,  G01P15/0802 ,  G01P15/09 ,  H01L41/0475 ,  H01L41/0825 ,  H01L41/1138 ,  H01L41/257 ,  H01L41/29 ,  H01L41/35 ,  Y10T29/42

摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention may include a membrane 110, a piezoelectric body 130 formed over the membrane 110, an electrode 140 formed on the piezoelectric body 130, a first pad 150 electrically connected with the electrode 140, a second pad 160 electrically connected with an integrated circuit 170, and a connection member 180 electrically connecting the first pad 150 with the second pad 160.

公开(公告)号：US20130167633A1

公开(公告)日：2013-07-04

申请号：US13408932

申请日：2012-02-29

申请人： Seng Mo LIM ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Yun Sung KANG ,  Kyo Yeol LEE

发明人： Seng Mo LIM ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Yun Sung KANG ,  Kyo Yeol LEE

IPC分类号： G01C19/56 ,  H01L41/22

CPC分类号： G01P15/09 ,  Y10T29/42

摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention includes a membrane 110, a piezoelectric body 120 formed in a multilayer above the membrane 110, a first electrode 130 formed between the membrane 110 and the piezoelectric body 120, a second electrode 140 formed on an exposed surface of the piezoelectric body 120, and a third electrode 150 formed between layers of the piezoelectric body 120 formed in a multilayer.

摘要翻译： 这里公开了惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100包括膜110，形成在膜110上方的多层中的压电体120，形成在膜110和压电体120之间的第一电极130，第二电极140 形成在压电体120的暴露表面上，以及形成在多层形成的压电体120的层之间的第三电极150。

公开(公告)号：US20120297874A1

公开(公告)日：2012-11-29

申请号：US13213948

申请日：2011-08-19

申请人： Jong Woon KIM ,  Jung Won LEE ,  Seung Hun HAN ,  Won Kyu JEUNG ,  Yun Sung KANG ,  Heung Woo PARK

发明人： Jong Woon KIM ,  Jung Won LEE ,  Seung Hun HAN ,  Won Kyu JEUNG ,  Yun Sung KANG ,  Heung Woo PARK

IPC分类号： G01C19/56

CPC分类号： G01C19/56

摘要： Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

摘要翻译： 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110，设置在膜110的中心部分111下方并包括集成电路的质量体130，以及设置有柱140 在膜110的边缘112下方围绕质量体130，从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积，以实现薄而小的惯性传感器100。