摘要:
Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention may include a membrane 110, a piezoelectric body 130 formed over the membrane 110, an electrode 140 formed on the piezoelectric body 130, a first pad 150 electrically connected with the electrode 140, a second pad 160 electrically connected with an integrated circuit 170, and a connection member 180 electrically connecting the first pad 150 with the second pad 160.
摘要:
Disclosed is an inertial sensor, including a membrane, a mass body provided underneath a central portion of the membrane, a post provided underneath a peripheral portion of the membrane, and a cap having a peripheral portion bonded to a lower surface of the post using low-temperature silicon direct bonding. A method of manufacturing the inertial sensor is also provided.
摘要:
Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
摘要:
Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
摘要:
There are provided a piezoelectric device, an inkjet print head, and a method of manufacturing the same. The piezoelectric device includes piezoelectric ceramic powder containing 90 parts by weight or more to less than 100 parts by weight of Pb(Zr, Ti)O3, and more than 0 part by weight to 10 parts by weight or less of glass frit, based on 100 parts by weight of a piezoelectric substance composition for the piezoelectric device, wherein the glass frit contains 10 to 20 parts by weight of ZnO, based on 100 parts by weight of glass frit.
摘要:
There are provided a piezoelectric device, an inkjet print head, and a method of manufacturing the same. The piezoelectric device includes piezoelectric ceramic powder containing 90 parts by weight or more to less than 100 parts by weight of Pb(Zr, Ti)O3, and more than 0 part by weight to 10 parts by weight or less of glass frit, based on 100 parts by weight of a piezoelectric substance composition for the piezoelectric device, wherein the glass frit contains 10 to 20 parts by weight of ZnO, based on 100 parts by weight of glass frit.
摘要:
Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.
摘要:
Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.
摘要:
There is provided an ink path structure, including: a pressure chamber storing ink introduced thereinto to discharge the ink to a nozzle; and a path discharging the ink by pressure generated within the pressure chamber and then supplying the ink to the pressure chamber and being repeatedly expanded and contracted in a direction toward the pressure chamber to attenuate a residual pressure wave remaining in the pressure chamber.
摘要:
There is provided an inkjet print head including: a head plate having nozzles arranged in a length direction, in which each of the nozzles ejects ink therethrough from a side surface of the head plate; an ink inlet provided in the lower portion of the head plate and drawing ink therethrough; a pressure chamber storing the ink drawn in through the ink inlet and communicating with the nozzle; and a piezoelectric element supplying the pressure chamber with driving force in a direction perpendicular to a direction of the ink ejected through the nozzle communicating with the pressure chamber and disposed on the pressure chamber having a membrane interposed therebetween.