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公开(公告)号:US20180242851A1
公开(公告)日:2018-08-30
申请号:US15752622
申请日:2016-08-31
CPC分类号: A61B5/01 , A61B1/0008 , A61B5/0048 , A61B5/0053 , A61B5/0531 , A61B5/0816 , A61B5/6843 , A61B5/7278 , A61B2560/0223 , A61B2560/0252 , G01K7/22 , G01K7/24 , G01L1/16 , G01L9/0005 , H01L41/042 , H01L41/0825 , H01L41/0926 , H01L41/1132 , H01L41/193
摘要: The invention provides an electroactive material (preferably electroactive polymer) sensor system, comprising an electroactive material sensor (22) and a control system (28) for performing measurements relating to the impedance of the electroactive material sensor at at least first and second different frequencies. From these measurements a temperature at the sensor and an external pressure or force applied to the sensor can be determined. The sensor can thus be used as a pressure sensor and as a temperature sensor. When used in combination with actuation, an electroactive material actuator with integrated temperature sensing functionality is able to measure the temperature at the exact actuator position, which is always closer than an external thermocouple.
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公开(公告)号:US10013969B2
公开(公告)日:2018-07-03
申请号:US15353720
申请日:2016-11-16
发明人: Wei Li , Paul Dunham , Chak-Yoon Aw , N. Chris Chaggares
IPC分类号: B06B1/06 , G01N29/14 , G01N29/28 , G10K11/30 , G10K11/168 , H01L41/08 , B81B3/00 , B06B1/02 , G01N29/24
CPC分类号: G10K11/30 , B06B1/0292 , B06B1/0611 , B81B3/0021 , B81B2201/02 , G01N29/06 , G01N29/221 , G01N29/2406 , G01N29/2437 , G01N29/28 , G10K11/168 , H01L41/0825
摘要: Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens.
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公开(公告)号:US09972768B2
公开(公告)日:2018-05-15
申请号:US14461091
申请日:2014-08-15
申请人: Novasentis, Inc.
IPC分类号: H01L41/04 , H01L41/193 , H01L41/083 , H01L41/08 , H01L41/09
CPC分类号: H01L41/193 , H01L41/04 , H01L41/0825 , H01L41/083 , H01L41/0926
摘要: An electromechanical polymer (EMP) transducer may include (a) one or more EMP layers each having a first operating characteristic; and (b) one or more EMP layers each having a second operating characteristic different from the first operating characteristic. The EMP transducer may include at least two EMP layers that are activated independently, and one or more EMP layers being configured to be a sensing layer. The sensing layer may sensitive to one or both of the operating characteristics (e.g., temperature, strain, pressure and their respective rates of change). Other operating characteristic may include resin type, modulus, film thicknesses, degrees of deformations, operating temperature ranges, a stretching ratio of the EMP layers, metallization patterns of electrodes, arrangements of active and inactive EMP layers, arrangements of irradiated EMP layers, arrangements of EMP layers acting as sensors, and arrangements of inactive layers of various degrees of stiffness.
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公开(公告)号:US20180068154A1
公开(公告)日:2018-03-08
申请号:US15490978
申请日:2017-04-19
发明人: Wensi SUN , Anpeng BAI
IPC分类号: G06K9/00 , H01L41/08 , H01L41/29 , H01L41/187 , H01L41/047 , B06B1/06
CPC分类号: G06K9/0002 , B06B1/0629 , G06K9/00053 , H01L41/0477 , H01L41/0825 , H01L41/1876 , H01L41/29
摘要: The present disclosure discloses an ultrasonic transducer. The ultrasonic transducer includes a piezoelectric layer. The piezoelectric layer includes an array of piezoelectric posts, a plurality of emitting electrodes, and a plurality of receiving electrodes. The piezoelectric posts are configured for emitting and receiving ultrasonic wave. The material of each of the piezoelectric posts includes lead zirconate titanate piezoelectric ceramics. The emitting electrodes are formed on a lower surface of the piezoelectric layer by a sputtering process. The receiving electrodes are formed on an upper surface of the piezoelectric layer by the sputtering process. Each of the emitting electrodes and each of the receiving electrodes include lead, zirconium, titanium, and/or alloys thereof. The present disclosure also discloses a method for manufacturing the ultrasonic transducer, an ultrasonic fingerprint recognition sensor having the ultrasonic transducer, and an electronic device having the ultrasonic fingerprint recognition sensor.
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公开(公告)号:US20170317264A1
公开(公告)日:2017-11-02
申请号:US15581169
申请日:2017-04-28
发明人: Toshio Tomiyoshi
CPC分类号: H01L41/0825 , B06B1/0292 , B06B1/06 , B06B1/10 , H01L41/0533 , H01L41/23 , H01L41/27
摘要: In an ultrasonic transducer manufacturing method, an ultrasonic device is mounted on a substrate, and a protective film having an acoustic matching layer thereon is prepared. Then, the protective film having the acoustic matching layer thereon is placed over the ultrasonic device such that the acoustic matching layer is in contact with the ultrasonic device.
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公开(公告)号:US20170160242A1
公开(公告)日:2017-06-08
申请号:US15323662
申请日:2015-07-06
发明人: Chikara KOJIMA
IPC分类号: G01N29/34
CPC分类号: G01N29/34 , A61B8/04 , A61B8/4427 , A61B8/4444 , A61B8/4494 , B06B1/0629 , G01N29/12 , G01N29/2437 , G01N29/245 , G01N2291/014 , H01L41/047 , H01L41/053 , H01L41/0825 , H01L41/0973 , H01L41/1132 , H04R17/10
摘要: An ultrasound sensor includes a substrate on which an opening portion is formed; a diaphragm which is provided on the substrate so as to block the opening portion; and ultrasound elements which include a first electrode, a piezoelectric layer and a second electrode and which are laminated on an opposite side to the opening portion of the diaphragm, a portion in which the first electrode, the piezoelectric layer and the second electrode are overlapped is referred to as an active portion, and a portion which is a range to the extent that the diaphragm is oscillatable by driving the active portion is referred to as a movable portion, the active portion is arranged opposite to the movable portion; a resonance frequency adjustment portion is provided on a lateral side of the active portion, at least in a region opposite to the movable portion.
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公开(公告)号:US20170133004A1
公开(公告)日:2017-05-11
申请号:US15353720
申请日:2016-11-16
发明人: Wei Li , Paul Dunham , Chak-Yoon Aw , N. Chris Chaggares
CPC分类号: G10K11/30 , B06B1/0292 , B06B1/0611 , B81B3/0021 , B81B2201/02 , G01N29/06 , G01N29/221 , G01N29/2406 , G01N29/2437 , G01N29/28 , G10K11/168 , H01L41/0825
摘要: Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens.
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公开(公告)号:US20160220230A1
公开(公告)日:2016-08-04
申请号:US15094717
申请日:2016-04-08
申请人: Volcano Corporation
发明人: Cheryl Rice , Dongjuan Chris Xi
IPC分类号: A61B8/00 , H01L41/08 , H01L41/047 , A61B8/12 , H01L41/29
CPC分类号: A61B8/4483 , A61B8/0891 , A61B8/12 , A61B8/445 , A61B8/4461 , B06B1/0662 , B06B1/0688 , H01L41/047 , H01L41/0472 , H01L41/0477 , H01L41/0825 , H01L41/0973 , H01L41/098 , H01L41/29 , H01L41/31 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要: The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
摘要翻译: 本公开提供了一种制造超声换能器的方法。 提供具有第一侧和与第一侧相对的第二侧的基板。 底部电极形成在衬底的第一侧上。 在底部电极上形成压电元件。 压电元件具有倒角侧壁。 顶部电极形成在压电元件上。 在靠近压电元件的倒角侧壁的顶部电极的一部分上形成阶梯金属元件。
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公开(公告)号:US20160219375A1
公开(公告)日:2016-07-28
申请号:US14604483
申请日:2015-01-23
发明人: Neal A. Hall , Donghwan Kim
IPC分类号: H04R17/02 , G01P15/09 , H01L41/113
CPC分类号: H04R17/02 , G01P15/0922 , H01L41/0825 , H04R1/04 , H04R1/406 , H04R2201/003
摘要: In some embodiments, a sensor system may include a deformable structure and a sensing element. The deformable structure may include at least one layer of piezoelectric material and at least one actuator port disposed on the at least one layer of piezoelectric material. The deformable structure may deform in response to external phenomenon. The at least one actuator port may be configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material. The at least one layer of piezoelectric material may be configured to apply a force to the deformable structure when actuated. The sensing element may be configured to sense deformation of the deformable structure capacitively, optically, or via a sensing port according to embodiments.
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公开(公告)号:US20160211439A1
公开(公告)日:2016-07-21
申请号:US14997496
申请日:2016-01-16
发明人: Khalil Najafi , Ethem Aktakka
IPC分类号: H01L41/09
CPC分类号: H01L41/0825 , H01L41/0946 , H01L41/0953 , H01L41/1136 , H02N2/0095 , H02N2/188
摘要: A multi-axis transducer is provided. The transducer includes: a stationary member; at least two connecting members and two or more energy-conversion elements disposed on each connecting member. Each connecting member is attached at one location thereof to one of the stationary member or a second connecting member and, in response to a stimuli, is free to move along any of three geometric axes that are perpendicular to each other. Each energy-conversion element operates to convert motion of the connecting member to electrical energy or vice versa. A common geometric plane passes through each of the at least two connecting members and the stationary member, and the two largest dimensions of each connecting member defines a geometric plane that is parallel with the common geometric plane.
摘要翻译: 提供多轴换能器。 传感器包括:固定构件; 至少两个连接构件和设置在每个连接构件上的两个或更多个能量转换元件。 每个连接构件在其一个位置处附接到固定构件或第二连接构件中的一个,并且响应于刺激,沿着彼此垂直的三个几何轴线中的任一个自由地移动。 每个能量转换元件用于将连接构件的运动转换为电能,反之亦然。 共同的几何平面通过至少两个连接构件和静止构件中的每一个,并且每个连接构件的两个最大尺寸限定与公共几何平面平行的几何平面。
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