公开(公告)号：US08850888B2

公开(公告)日：2014-10-07

申请号：US13409039

申请日：2012-02-29

Applicant: Seung Mo Lim ,  Sung Wook Kim ,  Sung Jun Lee ,  Kyo Yeol Lee ,  Yun Sung Kang

Inventor： Seung Mo Lim ,  Sung Wook Kim ,  Sung Jun Lee ,  Kyo Yeol Lee ,  Yun Sung Kang

IPC: G01C19/56 ,  G01P15/09

CPC classification number: G01C19/56 ,  G01P15/09 ,  G01P15/14 ,  G01P2015/084

Abstract: Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.

Abstract translation: 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括：膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140，以便垂直地与质量体120的驱动方向相遇。 通过这种构造，通过在压电体130的厚度方向上收缩形成沟槽，以提供方向性，同时保持压电体130的刚性，以防止波在不必要的方向上传播，从而驱动惯性传感器100 在所需的特定方向。

公开(公告)号：US08806727B2

公开(公告)日：2014-08-19

申请号：US12712442

申请日：2010-02-25

Applicant: Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

Inventor： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC: H04R17/00

CPC classification number: B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

Abstract translation: 在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于 在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极 并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

公开(公告)号：US20100132176A1

公开(公告)日：2010-06-03

申请号：US12696325

申请日：2010-01-29

Applicant: Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

Inventor： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC: H01L41/22

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

Abstract: A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

Abstract translation: 通过丝网印刷形成厚层的方法以及形成喷墨头的压电致动器的方法。 形成厚层的方法包括在表面上形成预定深度的引导槽，并且通过丝网印刷将引导槽内的表面施加材料形成厚层。 形成压电致动器的方法包括在振动板的顶表面上形成绝缘层，并且在与振动板的顶表面对应的位置处在振动板的顶表面或绝缘层中形成预定深度的引导槽 的压力室，在绝缘层的顶表面上形成下电极; 通过丝网印刷在引导槽内形成压电层，并在压电层的顶表面上形成上电极。

公开(公告)号：US20100126364A1

公开(公告)日：2010-05-27

申请号：US12696320

申请日：2010-01-29

Applicant: Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

Inventor： Kyo-yeol LEE ,  Tae-kyung Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Seung-mo Lim

IPC: B41M1/12

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491 ,  H05K3/107 ,  H05K3/1216 ,  Y10T29/42

Abstract: A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

公开(公告)号：US07682001B2

公开(公告)日：2010-03-23

申请号：US11581333

申请日：2006-10-17

Applicant: Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

Inventor： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

Abstract translation: 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US07566578B2

公开(公告)日：2009-07-28

申请号：US10673251

申请日：2003-09-30

Applicant: Joon-seop Kwak ,  Kyo-yeol Lee ,  Jae-hee Cho ,  Su-hee Chae

Inventor： Joon-seop Kwak ,  Kyo-yeol Lee ,  Jae-hee Cho ,  Su-hee Chae

IPC: H01L21/00

CPC classification number: H01L33/04 ,  B82Y20/00 ,  H01L33/0079 ,  H01L33/38 ,  H01L33/382 ,  H01L33/46 ,  H01L33/641 ,  H01L2933/0016 ,  H01S5/0207 ,  H01S5/021 ,  H01S5/0217 ,  H01S5/024 ,  H01S5/02461 ,  H01S5/02476 ,  H01S5/0424 ,  H01S5/0425 ,  H01S5/34333 ,  Y10S438/928

Abstract: A GaN based III-V nitride semiconductor light-emitting device and a method for fabricating the same are provided. In the GaN based III-V nitride semiconductor light-emitting device including first and second electrodes arranged facing opposite directions or the same direction with a high-resistant substrate therebetween and material layers for light emission or lasing, the second electrode directly contacts a region of the outmost material layer exposed through an etched region of the high-resistant substrate. A thermal conductive layer may be formed on the bottom of the high-resistant substrate to cover the exposed region of the outmost material layer.

公开(公告)号：US20070186397A1

公开(公告)日：2007-08-16

申请号：US11583798

申请日：2006-10-20

Applicant: Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

Inventor： Seung-mo Lim ,  Kyo-yeol Lee ,  Jae-woo Chung ,  Hwa-sun Lee ,  Jae-chang Lee

IPC: H04R17/00

CPC classification number: B41J2/161 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49401

Abstract: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

Abstract translation: 提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面 通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。 根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

公开(公告)号：US20060212976A1

公开(公告)日：2006-09-21

申请号：US11357221

申请日：2006-02-21

Applicant: Yoon-ho Khang ,  Kyo-yeol Lee ,  Eun-hye Lee ,  Joo-hyun Lee

Inventor： Yoon-ho Khang ,  Kyo-yeol Lee ,  Eun-hye Lee ,  Joo-hyun Lee

IPC: H01L51/40

CPC classification number: H01L21/28273 ,  B82Y10/00 ,  H01L29/42332 ,  H01L29/7881 ,  Y10S438/962

Abstract: Provided is a nonvolatile memory device and a method of manufacturing the same. The nonvolatile memory device includes a semiconductor substrate on which a source, a drain, and a channel region are formed, a tunneling oxide film formed on the channel region, a floating gate formed of a fullerene material on the tunneling oxide, a blocking oxide film formed on the floating gate, and a gate electrode formed on the blocking oxide film.

公开(公告)号：US20060051257A1

公开(公告)日：2006-03-09

申请号：US11218465

申请日：2005-09-06

Applicant: Kyo-yeol Lee ,  Eun-hye Lee

Inventor： Kyo-yeol Lee ,  Eun-hye Lee

IPC: B01J12/02

CPC classification number: C01B33/029

Abstract: Provided is a pyrolysis furnace having a gas flowing path controller with an improved structure. The pyrolysis furnace includes: a silicon substrate; a main body of the pyrolysis furnace; a heating unit that is formed around the main body and controls the temperature of the main body; at least one gas supplying tube through which a gas flows into the main body; and a gas flowing path controller that is installed inside the main body and controls the flow of the gas. As a result, controlling and manufacturing of small-sized nanoparticles with excellent characteristics is possible.

公开(公告)号：US20130167633A1

公开(公告)日：2013-07-04

申请号：US13408932

申请日：2012-02-29

Applicant: Seng Mo LIM ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Yun Sung KANG ,  Kyo Yeol LEE

Inventor： Seng Mo LIM ,  Sung Jun LEE ,  Sang Jin KIM ,  Jung Won LEE ,  Yun Sung KANG ,  Kyo Yeol LEE

IPC: G01C19/56 ,  H01L41/22

CPC classification number: G01P15/09 ,  Y10T29/42

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention includes a membrane 110, a piezoelectric body 120 formed in a multilayer above the membrane 110, a first electrode 130 formed between the membrane 110 and the piezoelectric body 120, a second electrode 140 formed on an exposed surface of the piezoelectric body 120, and a third electrode 150 formed between layers of the piezoelectric body 120 formed in a multilayer.

Abstract translation: 这里公开了惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100包括膜110，形成在膜110上方的多层中的压电体120，形成在膜110和压电体120之间的第一电极130，第二电极140 形成在压电体120的暴露表面上，以及形成在多层形成的压电体120的层之间的第三电极150。