METHOD OF POLING PIEZOELECTRIC ACTUATOR
    1.
    发明申请
    METHOD OF POLING PIEZOELECTRIC ACTUATOR 审中-公开
    压电致动器的方法

    公开(公告)号:US20090015102A1

    公开(公告)日:2009-01-15

    申请号:US11936838

    申请日:2007-11-08

    IPC分类号: H01L41/09 H01L41/22

    摘要: A method of poling a piezoelectric actuator, which can improve the uniformity of a plurality of piezoelectric actuators. In the method, a plurality of piezoelectric actuators are prepared for poling. Then, at least two preliminary poling processes are performed on the prepared piezoelectric actuators under different preliminary voltages and displacements of the piezoelectric actuators subjected to each of the at least two poling processes are measured. A relationship between a voltage and a displacement for each of the piezoelectric actuators is established. Poling voltages are calculated so that the piezoelectric actuators can have the same target displacement. Formal poling is performed on the piezoelectric actuators under the calculated poling voltages. The displacements of the piezoelectric actuators, which have completed the formal poling, are measured.

    摘要翻译: 一种极化压电致动器的方法,其可以改善多个压电致动器的均匀性。 在该方法中,准备多个压电致动器用于极化。 然后,在不同的初始电压下对制备好的压电致动器进行至少两个初步极化处理,并且测量经受至少两个极化过程中的每一个的压电致动器的位移。 建立了每个压电致动器的电压和位移之间的关系。 计算极化电压,使得压电致动器可以具有相同的目标位移。 在计算出的极化电压下,对压电致动器进行正电极化。 测量完成正式极化的压电致动器的位移。

    METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD
    2.
    发明申请
    METHOD OF FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD 审中-公开
    喷嘴头压电致动器的形成方法

    公开(公告)号:US20090322829A1

    公开(公告)日:2009-12-31

    申请号:US12553511

    申请日:2009-09-03

    IPC分类号: B41J2/045

    摘要: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

    摘要翻译: 提供一种形成在振动板上的喷墨头的压电致动器的方法,以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极,在下电极上形成压电层,位于每个压力室之上,形成覆盖下电极和压电层的保护层,暴露压电层的上表面 通过减小保护层和压电层的厚度,在压电层的上表面上形成上电极,除去保护层。 根据本发明,由于具有平坦的上表面的压电层形成均匀的图形,所以形成在其上的上电极的面积和厚度被均匀地控制。

    INKJET PRINTHEAD HAVING PIEZOELECTRIC ACTUATOR AND METHOD OF DRIVING THE PIEZOELECTRIC ACTUATOR
    4.
    发明申请
    INKJET PRINTHEAD HAVING PIEZOELECTRIC ACTUATOR AND METHOD OF DRIVING THE PIEZOELECTRIC ACTUATOR 失效
    具有压电致动器的喷墨打印机和驱动压电致动器的方法

    公开(公告)号:US20100194828A1

    公开(公告)日:2010-08-05

    申请号:US12755474

    申请日:2010-04-07

    IPC分类号: B41J2/045

    CPC分类号: B41J2/14233

    摘要: An inkjet printhead and a method of driving the inkjet printhead include a flow channel substrate having a pressure chamber, and a piezoelectric actuator formed on the flow channel substrate to apply a driving force to the pressure chamber to eject ink. The piezoelectric actuator includes a piezoelectric layer formed on the flow channel substrate to correspond to the pressure chamber, and a plurality of common electrodes and a plurality of driving electrodes alternately arranged in a length direction of the piezoelectric layer.

    摘要翻译: 喷墨打印头和驱动喷墨打印头的方法包括:具有压力室的流路基板和形成在流路基板上的压电致动器,用于向压力室施加驱动力以喷射油墨。 压电致动器包括形成在流路基板上以对应于压力室的压电层,以及沿压电层的长度方向交替布置的多个公共电极和多个驱动电极。