摘要:
A method of poling a piezoelectric actuator, which can improve the uniformity of a plurality of piezoelectric actuators. In the method, a plurality of piezoelectric actuators are prepared for poling. Then, at least two preliminary poling processes are performed on the prepared piezoelectric actuators under different preliminary voltages and displacements of the piezoelectric actuators subjected to each of the at least two poling processes are measured. A relationship between a voltage and a displacement for each of the piezoelectric actuators is established. Poling voltages are calculated so that the piezoelectric actuators can have the same target displacement. Formal poling is performed on the piezoelectric actuators under the calculated poling voltages. The displacements of the piezoelectric actuators, which have completed the formal poling, are measured.
摘要:
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
摘要:
An actuating device is provided, which includes a deformable membrane, walls formed on the membrane to define cavities, rods formed within the cavities, and on the surface of the membrane on one side with reference to a cavity center, to move in association with the deformation of the membrane, and an actuating unit formed on a lower side of the membrane to be piezoelectrically driven to deform the membrane. The actuating device is applicable to miniaturized electronic devices and can actuate the function modules appropriately.
摘要:
An inkjet printhead and a method of driving the inkjet printhead include a flow channel substrate having a pressure chamber, and a piezoelectric actuator formed on the flow channel substrate to apply a driving force to the pressure chamber to eject ink. The piezoelectric actuator includes a piezoelectric layer formed on the flow channel substrate to correspond to the pressure chamber, and a plurality of common electrodes and a plurality of driving electrodes alternately arranged in a length direction of the piezoelectric layer.