公开(公告)号：US20050233076A1

公开(公告)日：2005-10-20

申请号：US11111100

申请日：2005-04-20

申请人： Shao-Ming Hsu ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh ,  Chen-Kun Teng

发明人： Shao-Ming Hsu ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh ,  Chen-Kun Teng

IPC分类号： C23C14/00 ,  C23C14/32

CPC分类号： H01L21/68735 ,  H01L21/67034 ,  H01L21/6875 ,  H01L21/68757

摘要： An apparatus (20) for supporting a substrate (S2) includes a number of slats (28), a number of connecting blocks (24) separately positioned on the slats, and a number of soft sleeves (22) connected with the connecting blocks, respectively. Because top surfaces of the soft sleeves are shaped as annular, the force applied between the substrate and the soft sleeves is distributed, and is reduced at each contact point. The surface of the substrate is hardly if at all deformed by the soft sleeves, thereby reducing the risk of or even altogether preventing the formation of undulations. The quality of the pattern to be processed is improved.

摘要翻译： 用于支撑基板（S 2）的装置（20）包括多个板条（28），分开定位在板条上的多个连接块（24）和与连接块连接的多个软套筒（22） ， 分别。 由于软套筒的顶面形状为环形，所以施加在基体和软套之间的力分布，并在每个接触点处被减小。 如果通过软套筒变形，基材的表面几乎不变，从而降低或甚至完全防止起伏形成的风险。 要处理的图案的质量得到改善。