Method of making multi-layer gate structure with different stoichiometry
silicide layers
    10.
    发明授权
    Method of making multi-layer gate structure with different stoichiometry silicide layers 失效
    制备具有不同化学计量硅化物层的多层栅极结构的方法

    公开(公告)号:US5907784A

    公开(公告)日:1999-05-25

    申请号:US799833

    申请日:1997-02-13

    申请人: William L. Larson

    发明人: William L. Larson

    摘要: A method of forming a multi-layer silicide gate structure for a MOS type semiconductor device that includes the processing steps of first providing a substrate, then depositing a gate oxide layer on the substrate, then depositing a first refractory metal silicide layer which has a first stoichometry on the gate oxide layer, and finally depositing a second refractory metal silicide layer which has a second stoichometry different than the first stoichometry on the first deposited refractory metal silicide layer.

    摘要翻译: 一种形成用于MOS型半导体器件的多层硅化物栅极结构的方法,包括以下步骤:首先提供衬底,然后在衬底上沉积栅氧化层,然后沉积第一难熔金属硅化物层,其具有第一 在第一沉积难熔金属硅化物层上沉积第二难熔金属硅化物层,该第二难熔金属硅化物层具有与第一沉积物不同的第二固态测量法。