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    Method and apparatus for enhancing in-situ gas flow measurement performance
    2.
    发明授权
    Method and apparatus for enhancing in-situ gas flow measurement performance 有权
    用于提高原位气流测量性能的方法和装置

    公开(公告)号：US08271211B2

    公开(公告)日：2012-09-18

    申请号：US12634593

    申请日：2009-12-09

    申请人： Sherk Chung ,  James MacAllen Chalmers ,  Jialing Chen ,  Yi Wang ,  Paul Tran ,  Sophia Leonidovna Shtilman ,  Joseph R. Monkowski

    发明人： Sherk Chung ,  James MacAllen Chalmers ,  Jialing Chen ,  Yi Wang ,  Paul Tran ,  Sophia Leonidovna Shtilman ,  Joseph R. Monkowski

    IPC分类号： G01F1/34

    CPC分类号： G01F15/046 ,  G01F1/34 ,  Y10T137/0324

    摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

    摘要翻译： 原位气体流量测量控制器测量流量控制装置（FCD）上游的压降的温度和速率。 控制器对压力和温度数据进行采样，并将等效的抽取滤波器应用于数据，以较慢的采样速率产生滤波数据。 控制器通过对A / D转换器的采样时钟进行计数来计算时间戳，A / D转换器采样时间间隔采样压力，以确保与压力样本相关联的时间戳准确，并且不包含与软件时钟相关的抖动。 控制器另外对温度读数进行标准化以考虑电源波动，从压力和温度读数滤除噪声，并在不稳定期间排除数据。 它计算气体流量，考虑压力测量中可能的非线性，并通过许多可能的接口之一提供计算的气体流量测量。

    METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
    5.
    发明申请
    METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE 有权
    用于增加现场气体流量测量性能的方法和装置

    公开(公告)号：US20110137581A1

    公开(公告)日：2011-06-09

    申请号：US12634568

    申请日：2009-12-09

    申请人： Sherk CHUNG ,  James MacAllen Chalmers ,  Jialing Chen ,  Yi Wang ,  Paul Tran ,  Sophia Leonidovna Shtilman ,  Joseph R. Monkowski

    发明人： Sherk CHUNG ,  James MacAllen Chalmers ,  Jialing Chen ,  Yi Wang ,  Paul Tran ,  Sophia Leonidovna Shtilman ,  Joseph R. Monkowski

    IPC分类号： G01F1/34

    CPC分类号： G01F15/061 ,  G01F1/88 ,  G01F15/04 ,  G01F15/043 ,  Y10T137/0324

    摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

    摘要翻译： 原位气体流量测量控制器测量流量控制装置（FCD）上游的压降的温度和速率。 控制器对压力和温度数据进行采样，并将等效的抽取滤波器应用于数据，以较慢的采样速率产生滤波数据。 控制器通过对A / D转换器的采样时钟进行计数来计算时间戳，A / D转换器采样时间间隔采样压力，以确保与压力样本相关联的时间戳准确，并且不包含与软件时钟相关的抖动。 控制器另外对温度读数进行标准化以考虑电源波动，从压力和温度读数滤除噪声，并在不稳定期间排除数据。 它计算气体流量，考虑压力测量中可能的非线性，并通过许多可能的接口之一提供计算的气体流量测量。

    Method and apparatus for in situ testing of gas flow controllers
    9.
    发明授权
    Method and apparatus for in situ testing of gas flow controllers 有权
    用于气体流量控制器原位测试的方法和装置

    公开(公告)号：US08240324B2

    公开(公告)日：2012-08-14

    申请号：US12355654

    申请日：2009-01-16

    申请人： Joseph R. Monkowski ,  Jialing Chen ,  Tao Ding ,  James MacAllen Chalmers

    发明人： Joseph R. Monkowski ,  Jialing Chen ,  Tao Ding ,  James MacAllen Chalmers

    IPC分类号： G05D7/06

    CPC分类号： G01F25/0053 ,  G01F25/0038 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/7762

    摘要： Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test. A pressure regulator is coupled to a gas source. The GFC is positioned downstream of the pressure regulator. A pressure transducer is measuring pressure in a volume between the pressure regulator and the GFC, wherein means are provided for increasing the pressure in the volume.

    摘要翻译： 方法和设备利用气体流量控制器（GFC）上游压力的下降速率来精确测量通过GFC的流量。 通过今天生产使用中的许多气体流量控制器的气体流量的测量是可以实现的，而不需要任何特殊或复杂的压力调节器或其他特殊部件。 各种规定确保在测量期间或之后发生的压力变化不会扰乱通过被测GFC的气体的恒定流量。 压力调节器耦合到气源。 GFC位于压力调节器的下游。 压力传感器测量压力调节器和GFC之间的体积压力，其中提供用于增加体积中的压力的​​装置。