公开(公告)号：US06321600B1

公开(公告)日：2001-11-27

申请号：US09360549

申请日：1999-07-26

申请人： Shigeru Hirose ,  Masato Ando ,  Yoshiyuki Nakamizo ,  Takeshi Arikura ,  Tsutomu Sawai

发明人： Shigeru Hirose ,  Masato Ando ,  Yoshiyuki Nakamizo ,  Takeshi Arikura ,  Tsutomu Sawai

IPC分类号： G01P1509

CPC分类号： G01P15/18 ,  G01P15/0922 ,  G01P2015/084

摘要： An acceleration detecting device capable of permitting a weight, a diaphragm and a base to be precisely positioned on a casing of a measuring equipment or the like. The weight, diaphragm and base are integrally formed of a metal material into a single unit. An insulating casing is integrally formed while incorporating the single unit as an insert therein. The insulating casing has a recess defined by a side wall thereof, which is formed with a window for exposing a part of the base therethrough. The recess of the casing is closed with a metal cover member, which is mounted on the casing. The cover member is integrally provided with a contactor which is elastically forced against the base through the window. The base is electrically connected to ground terminals of terminal fitments.

摘要翻译： 一种加速度检测装置，其能够使重量，隔膜和基座精确地定位在测量设备等的壳体上。 重量，隔膜和底座由金属材料整体形成为一个单元。 绝缘壳体一体形成，同时将单个单元作为插入件并入其中。 绝缘壳体具有由其侧壁限定的凹部，其形成有用于使基部的一部分暴露于其中的窗口。 壳体的凹部用安装在壳体上的金属盖构件封闭。 盖构件一体地设置有接触器，该接触器通过窗口弹性地抵靠基部。 基座电气连接到端子配件的接地端子。

公开(公告)号：US07122396B2

公开(公告)日：2006-10-17

申请号：US10530341

申请日：2003-10-03

申请人： Yoshiyuki Nakamizo ,  Tsutomu Sawai ,  Masato Ando

发明人： Yoshiyuki Nakamizo ,  Tsutomu Sawai ,  Masato Ando

IPC分类号： H01L21/00 ,  H01L21/20

CPC分类号： G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084

摘要： The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portion 9 is constituted by four trapezoidal inclined surfaces 13 of a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weight 3 is so constructed as to have an abutting portion including a linear portion 3d which abuts against the inclined surfaces 13 constituting the inner peripheral surface of the support portion 9 when the weight 3 makes a maximum displacement in a direction where a diaphragm portion 11 is located. The abutting portion 3d has a circular outline shape as seen from a side where a weight fixing portion 7 is located. A stopper structure is constituted by the inclined surfaces 13 and the abutting portion 3d of the weight 3, for restricting a displacement range of the weight 3 in the direction where the diaphragm portion 11 is located.

摘要翻译： 本发明提供一种半导体加速度传感器，其中即使当至少部分重量设置在半导体传感器元件的内部空间中并且相应地增加了重量时，也可以防止半导体元件损坏。 支撑部分9的内圆周表面由四个梯形倾斜表面13构成，其大体上相同的形状被环形地组合，以限定截头锥体空间的外周表面。 重物3被构造成具有邻接部分，该邻接部分包括直线部分3d，该直线部分3d在重量3沿着隔膜部分的方向发生最大位移时抵靠构成支撑部分9的内周面的倾斜表面13 11位于。 抵接部3d从配重固定部7的一侧观察时呈圆形的轮廓形状。 挡块结构由重物3的倾斜面13和抵接部3d构成，用于限制重量3在隔膜部11的方向上的位移范围。

公开(公告)号：US20060094148A1

公开(公告)日：2006-05-04

申请号：US10530341

申请日：2003-10-03

申请人： Yoshiyuki Nakamizo ,  Tsutomu Sawai ,  Masato Ando

发明人： Yoshiyuki Nakamizo ,  Tsutomu Sawai ,  Masato Ando

IPC分类号： H01L21/00

CPC分类号： G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084

摘要： The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portion 9 is constituted by four trapezoidal inclined surfaces 13 of a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weight 3 is so constructed as to have an abutting portion including a linear portion 3d which abuts against the inclined surfaces 13 constituting the inner peripheral surface of the support portion 9 when the weight 3 makes a maximum displacement in a direction where a diaphragm portion 11 is located. The abutting portion 3d has a circular outline shape as seen from a side where a weight fixing portion 7 is located. A stopper structure is constituted by the inclined surfaces 13 and the abutting portion 3d of the weight 3, for restricting a displacement range of the weight 3 in the direction where the diaphragm portion 11 is located.

公开(公告)号：US06148671A

公开(公告)日：2000-11-21

申请号：US161805

申请日：1998-09-28

申请人： Yoshiyuki Nakamizo ,  Hideki Kobayashi ,  Megumi Hashizaki

发明人： Yoshiyuki Nakamizo ,  Hideki Kobayashi ,  Megumi Hashizaki

IPC分类号： G01P15/09 ,  G01P15/18 ,  G01L1/00 ,  G01L3/00

CPC分类号： G01P15/0915 ,  G01P15/0907 ,  G01P15/0922 ,  G01P15/18 ,  G01P2015/084

摘要： An acceleration sensor capable of restraining a reduction in output thereof due to an electrostatic capacity between acceleration detecting electrodes and output electrodes. A low-dielectric layer is arranged between a connection line and a piezoelectric ceramic substrate. Another low-dielectric layer is arranged between additional connection lines and output electrodes, and the substrate. The low-dielectric layers are formed of a material substantially reduced in relative dielectric constant as compared with the substrate. The low-dielectric layers reduce an electrostatic capacity generated between wiring patterns and the output electrodes, and a counter electrode pattern, to thereby reduce the amount of spontaneous polarization charges accumulated in the electrostatic capacity.

摘要翻译： 一种加速度传感器，其能够抑制由加速度检测电极和输出电极之间的静电电容引起的输出的降低。 低介电层设置在连接线和压电陶瓷基片之间。 在另外的连接线和输出电极和基片之间布置另一低介电层。 低介电层由与基板相比显着降低的相对介电常数的材料形成。 低电介质层减少了布线图案和输出电极之间产生的静电电容以及对电极图案，从而减少了在静电电容中累积的自发极化电荷的量。