公开(公告)号：US06559066B2

公开(公告)日：2003-05-06

申请号：US09924304

申请日：2001-08-08

申请人： Shin-ichi Terashita ,  Shinji Yamagishi

发明人： Shin-ichi Terashita ,  Shinji Yamagishi

IPC分类号： H01L2131

CPC分类号： B08B7/0057 ,  H01L21/67115 ,  H01L27/1218 ,  H01L29/78603 ,  Y10T428/24917 ,  Y10T428/31504 ,  Y10T428/31663

摘要： A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n+Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light. Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.

公开(公告)号：US6057038A

公开(公告)日：2000-05-02

申请号：US898488

申请日：1997-07-22

申请人： Shin-ichi Terashita ,  Shinji Yamagishi

发明人： Shin-ichi Terashita ,  Shinji Yamagishi

IPC分类号： B32B9/04 ,  B32B15/00 ,  C23C14/00 ,  H01L21/31 ,  H01L21/469

CPC分类号： B08B7/0057 ,  H01L21/67115 ,  H01L27/1218 ,  H01L29/78603 ,  Y10T428/24917

摘要： A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n.sup.+ Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light.Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.

公开(公告)号：US5643471A

公开(公告)日：1997-07-01

申请号：US555728

申请日：1995-11-09

申请人： Noriaki Onishi ,  Masayuki Okamoto ,  Toshiyuki Hirai ,  Nobuaki Yamada ,  Nobukazu Nagae ,  Masahiko Kondo ,  Shin-ichi Terashita

发明人： Noriaki Onishi ,  Masayuki Okamoto ,  Toshiyuki Hirai ,  Nobuaki Yamada ,  Nobukazu Nagae ,  Masahiko Kondo ,  Shin-ichi Terashita

IPC分类号： G02F1/1334 ,  G02F1/1337 ,  G02F1/1339 ,  B44C1/22

CPC分类号： G02F1/13394

摘要： A liquid crystal device of the present invention includes a pair of substrates opposed to each other with a composite containing polymer regions and liquid crystal regions interposed therebetween, at least one of the substrates being transparent, wherein an insulator as a gap keeping member for keeping a gap between the substrates is formed in the polymer regions.

摘要翻译： 本发明的液晶显示装置包括：一对基板，其中含有聚合物区域和液晶区域的复合体彼此相对，所述至少一个所述基板是透明的，其中作为间隔保持部件的绝缘体用于保持 在聚合物区域中形成基板之间的间隙。