摘要:
A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n+Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light. Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.
摘要:
A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n.sup.+ Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light.Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.
摘要:
A liquid crystal display device includes: a first substrate; a second substrate; a liquid crystal layer interposed between the first and the second substrates; a plurality of electrodes for applying a voltage to the liquid crystal layer; a first alignment film provided on a surface of the first substrate in contact with the liquid crystal layer; a second alignment film provided on a surface of the second substrate in contact with the liquid crystal layer; and a plurality of pixels. The liquid crystal layer in each of the pixels includes first and second liquid crystal regions, liquid crystal molecules in the first and the second liquid crystal regions have an identical twisting direction. Pretilt angles of liquid crystal molecules in the first alignment region and the second alignment region on the first and the second alignment films differ from each other, and the liquid crystal display device is fabricated by a method including the step of irradiating light onto a predetermined area of each of the first and the second alignment films in a gas containing an organic compound.
摘要:
A liquid crystal device of the present invention includes a pair of substrates opposed to each other with a composite containing polymer regions and liquid crystal regions interposed therebetween, at least one of the substrates being transparent, wherein an insulator as a gap keeping member for keeping a gap between the substrates is formed in the polymer regions.