Substrate for use in display element, method of manufacturing the same, and apparatus for manufacturing the same

    公开(公告)号:US06559066B2

    公开(公告)日:2003-05-06

    申请号:US09924304

    申请日:2001-08-08

    IPC分类号: H01L2131

    摘要: A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n+Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light. Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.

    Substrate for use in display element, method of manufacturing the same,
and apparatus for manufacturing the same

    公开(公告)号:US6057038A

    公开(公告)日:2000-05-02

    申请号:US898488

    申请日:1997-07-22

    摘要: A switching element is formed by sequentially depositing on an insulating substrate a gate electrode, a gate insulating film made of an inorganic insulating film, a semiconductor layer, a channel protecting layer, an n.sup.+ Si layer that will form a source electrode and a drain electrode. Next, a metal layer and a transparent conductive film are formed on edges of the source electrode and the drain electrode. The insulating substrate on which the above films have been deposited is cleaned with vacuum ultraviolet light, before further depositing an interlayer insulating film and a pixel electrode. A substrate for use in a display element obtained in this manner exhibits an excellent adhesion strength between the film processed with vacuum ultraviolet light and a film adjacent to the film processed with vacuum ultraviolet light.Here, if a photosensitive resin blended with a silane compound is used as the interlayer insulating film, the adhesion is improved of the interlayer insulating film to the transparent conductive film and the inorganic insulating film that are in contact with the interlayer insulating film.

    Liquid crystal display device, method and apparatus for fabricating the
same
    3.
    发明授权
    Liquid crystal display device, method and apparatus for fabricating the same 失效
    液晶显示装置,其制造方法和装置

    公开(公告)号:US5850273A

    公开(公告)日:1998-12-15

    申请号:US711912

    申请日:1996-09-12

    IPC分类号: G02F1/1337 G02F1/141

    摘要: A liquid crystal display device includes: a first substrate; a second substrate; a liquid crystal layer interposed between the first and the second substrates; a plurality of electrodes for applying a voltage to the liquid crystal layer; a first alignment film provided on a surface of the first substrate in contact with the liquid crystal layer; a second alignment film provided on a surface of the second substrate in contact with the liquid crystal layer; and a plurality of pixels. The liquid crystal layer in each of the pixels includes first and second liquid crystal regions, liquid crystal molecules in the first and the second liquid crystal regions have an identical twisting direction. Pretilt angles of liquid crystal molecules in the first alignment region and the second alignment region on the first and the second alignment films differ from each other, and the liquid crystal display device is fabricated by a method including the step of irradiating light onto a predetermined area of each of the first and the second alignment films in a gas containing an organic compound.

    摘要翻译: 液晶显示装置包括:第一基板; 第二基板; 介于所述第一和第二基板之间的液晶层; 用于向液晶层施加电压的多个电极; 设置在与所述液晶层接触的所述第一基板的表面上的第一取向膜; 设置在与所述液晶层接触的所述第二基板的表面上的第二取向膜; 和多个像素。 每个像素中的液晶层包括第一和第二液晶区域,第一和第二液晶区域中的液晶分子具有相同的扭转方向。 第一取向区域中的第一取向区域和第二取向区域中的液晶分子的倾斜角度彼此不同,并且液晶显示装置通过包括以下步骤的方法制造:将光照射到预定区域 在包含有机化合物的气体中的第一和第二取向膜中的每一个。