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公开(公告)号:US20120162736A1
公开(公告)日:2012-06-28
申请号:US13412510
申请日:2012-03-05
申请人: Shingo UCHIYAMA , Johji YAMAGUCHI , Makoto SATO , Kunihiko SASAKURA , Hirofumi MORITA , Shuichiro INAGAKI , Katsuyuki MACHIDA , Hiromu ISHII , Makoto MURAKAMI
发明人: Shingo UCHIYAMA , Johji YAMAGUCHI , Makoto SATO , Kunihiko SASAKURA , Hirofumi MORITA , Shuichiro INAGAKI , Katsuyuki MACHIDA , Hiromu ISHII , Makoto MURAKAMI
IPC分类号: G02B26/08
CPC分类号: B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.