公开(公告)号：US5412329A

公开(公告)日：1995-05-02

申请号：US280567

申请日：1994-07-26

申请人： Shinji Iino ,  Tamio Kubota ,  Keiichi Yokota

发明人： Shinji Iino ,  Tamio Kubota ,  Keiichi Yokota

IPC分类号： G01R1/073 ,  H01L21/66 ,  G01R1/06

CPC分类号： G01R1/0735

摘要： A probe card used in a probing test machine which send and receive test signals into circuits through pads of a semiconductor chip, thereby examining the electrical characteristics of the circuits. The probe card comprises a supporting plate, a flexible printed circuit base including a flexible film base material supported by the supporting plate, circuits printed on the film base material being connected electrically to a tester, contactors connected electrically to the printed circuits and adapted to be brought into contact with the pads in equally corresponding relation, and a cushioning medium designed so as to back up a section in which the contactors are mounted. When the contactors are brought into contact with the pads, individually, the cushioning medium undergoes an elastic deformation, so that the contact between the contactors and the pads is improved.

摘要翻译： 用于探测试验机的探针卡，其通过半导体芯片的焊盘发送和接收测试信号到电路中，从而检查电路的电特性。 探针卡包括支撑板，柔性印刷电路基底，其包括由支撑板支撑的柔性膜基底材料，印刷在膜基材上的电路电连接到测试器，电连接到印刷电路的接触器， 以相同的对应关系与垫接触，以及缓冲介质，其被设计成支撑接触器安装的部分。 当接触器单独地与垫接触时，缓冲介质经历弹性变形，从而提高了接触器和焊盘之间的接触。