公开(公告)号：US20080067896A1

公开(公告)日：2008-03-20

申请号：US11898474

申请日：2007-09-12

申请人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/54 ,  H01L41/047 ,  H01L41/16 ,  H01L41/18

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574

摘要： An acoustic wave device includes a piezoelectric substrate, comb electrodes formed above the piezoelectric substrate, and a first dielectric film provided so as to cover the comb electrodes, the first dielectric film having empty spaces associated with fingers of the comb electrodes.

摘要翻译： 声波装置包括压电基板，形成在压电基板上方的梳形电极和设置成覆盖梳状电极的第一电介质膜，第一电介质膜具有与梳状电极的指状物相关联的空白空间。

公开(公告)号：US07573178B2

公开(公告)日：2009-08-11

申请号：US11898474

申请日：2007-09-12

申请人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574

摘要： An acoustic wave device includes a piezoelectric substrate, comb electrodes formed above the piezoelectric substrate, and a first dielectric film provided so as to cover the comb electrodes, the first dielectric film having empty spaces associated with fingers of the comb electrodes.

摘要翻译： 声波装置包括压电基板，形成在压电基板上方的梳形电极和设置成覆盖梳状电极的第一电介质膜，第一电介质膜具有与梳状电极的指状物相关联的空白空间。

公开(公告)号：US07688161B2

公开(公告)日：2010-03-30

申请号：US11976441

申请日：2007-10-24

申请人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/64 ,  H03H9/52 ,  H03H9/25

CPC分类号： H03H9/6483

摘要： An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

摘要翻译： 声波装置包括压电基板，具有设置在压电基板上方的梳状电极并激发声波的谐振器，以及设置在压电基板上方并与谐振器串联或并联连接的电容器，电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比，电容器的电极比压电基片更远。

公开(公告)号：US20080074212A1

公开(公告)日：2008-03-27

申请号：US11902800

申请日：2007-09-25

申请人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/64 ,  H03H9/25

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6459 ,  H03H9/6469 ,  H03H9/6483

摘要： A filter includes a parallel resonator having first comb electrodes provided on a piezoelectric substrate and a first dielectric film that covers the first comb electrodes, and a series resonator having second comb electrodes provided on the piezoelectric substrate and a second dielectric film covers the second comb electrodes and is made of a material identical to that of the first dielectric film. The first dielectric film has a different thickness from that of the second dielectric film.

摘要翻译： 滤波器包括并联谐振器，其具有设置在压电基板上的第一梳状电极和覆盖第一梳状电极的第一电介质膜，以及设置在压电基板上的具有第二梳状电极的串联谐振器，第二电介质膜覆盖第二梳状电极 并且由与第一电介质膜相同的材料制成。 第一电介质膜的厚度与第二电介质膜的厚度不同。

公开(公告)号：US07741931B2

公开(公告)日：2010-06-22

申请号：US11902800

申请日：2007-09-25

申请人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Satoru Matsuda ,  Michio Miura ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/72 ,  H03H9/64

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6459 ,  H03H9/6469 ,  H03H9/6483

摘要： A filter includes a parallel resonator having first comb electrodes provided on a piezoelectric substrate and a first dielectric film that covers the first comb electrodes, and a series resonator having second comb electrodes provided on the piezoelectric substrate and a second dielectric film covers the second comb electrodes and is made of a material identical to that of the first dielectric film. The first dielectric film has a different thickness from that of the second dielectric film.

摘要翻译： 滤波器包括并联谐振器，其具有设置在压电基板上的第一梳状电极和覆盖第一梳状电极的第一电介质膜，以及设置在压电基板上的具有第二梳状电极的串联谐振器，第二电介质膜覆盖第二梳状电极 并且由与第一电介质膜相同的材料制成。 第一电介质膜的厚度与第二电介质膜的厚度不同。

公开(公告)号：US07659653B2

公开(公告)日：2010-02-09

申请号：US11902184

申请日：2007-09-19

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/145 ,  H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0057 ,  H03H9/02574 ,  H03H9/02929 ,  H03H9/14538 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.

摘要翻译： 声波装置包括压电基板，形成在压电基板上的第一电介质膜，以及设置在第一电介质膜上并激发声波的电极，电极包括电极指。 在电极指中相邻的电极指之间切出第一电介质膜的至少一部分。

公开(公告)号：US20080061657A1

公开(公告)日：2008-03-13

申请号：US11898359

申请日：2007-09-11

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/13 ,  H01L41/083

CPC分类号： H03H9/02559 ,  H03H9/0038 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.

摘要翻译： 声波装置包括压电基板，设置在压电基板上的第一电介质膜，设置在第一电介质膜上并激发声波的电极和设置成覆盖电极的第二电介质膜， 比电极厚。

公开(公告)号：US07564174B2

公开(公告)日：2009-07-21

申请号：US11898359

申请日：2007-09-11

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/145 ,  H03H9/25

CPC分类号： H03H9/02559 ,  H03H9/0038 ,  H03H9/0222 ,  H03H9/02574 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film provided on the piezoelectric substrate, electrodes that are provided on the first dielectric film and excite an acoustic wave, and a second dielectric film that is provided so as to cover the electrodes and is thicker than the electrodes.

摘要翻译： 声波装置包括压电基板，设置在压电基板上的第一电介质膜，设置在第一电介质膜上并激发声波的电极和设置成覆盖电极的第二电介质膜， 比电极厚。

公开(公告)号：US20080129418A1

公开(公告)日：2008-06-05

申请号：US11976441

申请日：2007-10-24

申请人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Shogo Inoue ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/64 ,  H01L41/047

CPC分类号： H03H9/6483

摘要： An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

摘要翻译： 声波装置包括压电基板，具有设置在压电基板上方的梳状电极并激发声波的谐振器，以及设置在压电基板上方并与谐振器串联或并联连接的电容器，电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比，电容器的电极比压电基片更远。

公开(公告)号：US20080067891A1

公开(公告)日：2008-03-20

申请号：US11902184

申请日：2007-09-19

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0057 ,  H03H9/02574 ,  H03H9/02929 ,  H03H9/14538 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.

摘要翻译： 声波装置包括压电基板，形成在压电基板上的第一电介质膜，以及设置在第一电介质膜上并激发声波的电极，电极包括电极指。 在电极指中相邻的电极指之间切出第一电介质膜的至少一部分。