Method for cleaning photo mask
    1.
    发明授权
    Method for cleaning photo mask 有权
    清洁光罩的方法

    公开(公告)号:US07718008B2

    公开(公告)日:2010-05-18

    申请号:US11839655

    申请日:2007-08-16

    IPC分类号: B08B7/00 G01N21/00

    CPC分类号: G03F7/70925 G03F1/64 G03F1/82

    摘要: The present invention provides a method for cleaning a photo mask without the need for removal of the pellicle mounted on the photo mask, without the large scale equipment for washing with a solution, with a small number of steps for cleaning and inspection, and without the increase of the production cost. The method for cleaning a photo mask with a pellicle mounted, in which the pellicle frame has a gas introducing hole and a gas discharging hole, comprises: a step of introducing a gaseous substituting substance from the gas introducing hole in a pellicle inner space surrounded by the photo mask and the pellicle, substituting foreign substances on the photo mask, and discharging the foreign substances from the gas discharging hole; and a step of irradiating an ultraviolet ray to the photo mask, while an air or a nitrogen gas or a rare gas is introduced from the gas introducing hole, for degrading the substituted substituting substance so as to be gaseous, and discharging the same from the gas discharging hole.

    摘要翻译: 本发明提供了一种清洁光掩模的方法,而不需要除去安装在光掩模上的防护薄膜组件,而不需要用溶液洗涤的大规模设备,具有少量用于清洁和检查的步骤,并且没有 增加生产成本。 用防护薄膜组件清洁光罩的方法,其中防护薄膜组件框架具有气体导入孔和气体排出孔,包括:将气体取代物质从气体导入孔引入防护薄膜组件内部空间的步骤, 光掩模和防护薄膜组件,在光掩模上代替异物,并从排气孔排出异物; 以及从气体导入孔导入空气或氮气或稀有气体而将紫外线照射到光掩模的步骤,使取代的取代物质降解成气态,并将其从 气体排放孔。

    Riding Type Grass Mower having a Rear-Discharge Type Mower Unit
    2.
    发明申请
    Riding Type Grass Mower having a Rear-Discharge Type Mower Unit 有权
    具有后排放式割草机的骑马式割草机

    公开(公告)号:US20110131942A1

    公开(公告)日:2011-06-09

    申请号:US12871992

    申请日:2010-08-31

    IPC分类号: A01D34/125

    CPC分类号: A01D34/71 A01D57/26

    摘要: A riding type grass mower includes a right wheel and a left wheel, a rear-discharge type mower unit disposed forwardly of the right/left wheels, a driver's seat disposed between and upwardly of the right/left wheels, an engine mounted rearwardly of the driver's seat, an engine hood for covering the engine, and a restricting unit disposed rearwardly of the driver's seat and at an area downwardly of the engine hood, the restricting unit having a restricting face (including a mesh face) configured to restrict upward rising of cut grass discharged from the mower unit.

    摘要翻译: 一种骑马式割草机包括右轮和左轮,设置在左/右车轮前方的后排放式割草机单元,设置在左/右车轮之间和之上的驾驶员座椅,安装在左/右车轮后方的发动机 驾驶员座椅,用于覆盖发动机的发动机罩,以及设置在驾驶员座椅后方和发动机罩下方的区域的限制单元,限制单元具有限制面(包括网眼面),其限制向上升高 割草机从割草机排出。

    Riding type grass mower having a rear-discharge type mower unit
    3.
    发明授权
    Riding type grass mower having a rear-discharge type mower unit 有权
    具有后排放式割草机的骑马式割草机

    公开(公告)号:US08117813B2

    公开(公告)日:2012-02-21

    申请号:US12871992

    申请日:2010-08-31

    IPC分类号: A01D67/00

    CPC分类号: A01D34/71 A01D57/26

    摘要: A riding type grass mower includes a right wheel and a left wheel, a rear-discharge type mower unit disposed forwardly of the right/left wheels, a driver's seat disposed between and upwardly of the right/left wheels, an engine mounted rearwardly of the driver's seat, an engine hood for covering the engine, and a restricting unit disposed rearwardly of the driver's seat and at an area downwardly of the engine hood, the restricting unit having a restricting face (including a mesh face) configured to restrict upward rising of cut grass discharged from the mower unit.

    摘要翻译: 一种骑马式割草机包括右轮和左轮,设置在左/右车轮前方的后排放式割草机单元,设置在左/右车轮之间和之上的驾驶员座椅,安装在左右车轮后方的发动机 驾驶员座椅,用于覆盖发动机的发动机罩,以及设置在驾驶员座椅后方和发动机罩下方的区域的限制单元,限制单元具有限制面(包括网眼面),其限制向上升高 割草机从割草机排出。

    Mower Unit Suspended from a Grass Mower
    4.
    发明申请
    Mower Unit Suspended from a Grass Mower 有权
    割草机悬挂在割草机上

    公开(公告)号:US20110232250A1

    公开(公告)日:2011-09-29

    申请号:US12872002

    申请日:2010-08-31

    IPC分类号: A01D19/00

    CPC分类号: A01D34/003

    摘要: A mower unit is disclosed, including a mower deck mounting therein in parallel layout first, second and third rotary blades rotatably driven about vertical axes and a washing device. The mower deck includes a top wall, side walls and first, second and third auxiliary side walls for evacuation, the auxiliary side walls having shapes along at least a machine body rear portion of the rotary path of each rotary blade. The washing device includes a single water supplying unit disposed upwardly of the top wall for supplying washing water and first, second and third water discharging units disposed through the first, second and third auxiliary side walls for discharging water to the first, second and third rotary blades respectively. The washing device includes also a water supplying pipe unit interconnecting and communicating the water supplying unit to the first, second and third water discharging units. The water supplying pipe unit is disposed within a mower deck rear space delimited by outer faces of the first, second and third auxiliary side walls. The first, second and third water discharging units are configured to discharge the washing water in such a manner that the center flow portion of the discharged water respectively therefrom is confined within the inner space of the mower deck.

    摘要翻译: 公开了一种割草机装置,包括以平行布局安装在其中的割草机甲板,第一和第三旋转叶片围绕垂直轴线可旋转地驱动和洗涤装置。 割草机底盘包括顶壁,侧壁以及用于排空的第一,第二和第三辅助侧壁,辅助侧壁具有至少每个旋转叶片的旋转路径的机体后部的形状。 洗涤装置包括设置在顶壁上方用于供应洗涤水的单个供水单元和通过第一,第二和第三辅助侧壁设置的第一,第二和第三排水单元,用于将水排放到第一,第二和第三旋转 刀片分别。 洗涤装置还包括将供水单元互连并连通到第一,第二和第三排水单元的供水管单元。 供水管单元设置在由第一,第二和第三辅助侧壁的外表面限定的割草机甲板后部空间内。 第一,第二和第三排水单元被构造成排出洗涤水,使得分别从其排出的水的中心流动部分被限制在割草机甲板的内部空间内。

    Mower unit with washing device suspended from a grass mower
    5.
    发明授权
    Mower unit with washing device suspended from a grass mower 有权
    割草机与洗衣机悬挂在割草机上

    公开(公告)号:US08087221B2

    公开(公告)日:2012-01-03

    申请号:US12872002

    申请日:2010-08-31

    IPC分类号: A01D19/00

    CPC分类号: A01D34/003

    摘要: A mower unit includes a mower deck mounting therein in parallel layout first, second and third rotary blades rotatably driven about vertical axes and a washing device. The mower deck includes a top wall, side walls and first, second and third auxiliary side walls for evacuation. The washing device includes a single water supplying unit disposed upwardly of the top wall for supplying washing water and first, second and third water discharging units disposed through the first, second and third auxiliary side walls for discharging water to the first, second and third rotary blades respectively. The washing device includes also a water supplying pipe unit interconnecting and communicating the water supplying unit to the first, second and third water discharging units. The water supplying pipe unit is disposed within a mower deck rear space delimited by outer faces of the first, second and third auxiliary side walls.

    摘要翻译: 割草机单元包括以平行布局安装在其中的割草机板,第一,第二和第三旋转叶片围绕垂直轴线可旋转地驱动,以及清洗装置。 割草机甲板包括顶壁,侧壁和用于排空的第一,第二和第三辅助侧壁。 洗涤装置包括设置在顶壁上方用于供应洗涤水的单个供水单元和通过第一,第二和第三辅助侧壁设置的第一,第二和第三排水单元,用于将水排放到第一,第二和第三旋转 刀片分别。 洗涤装置还包括将供水单元互连并连通到第一,第二和第三排水单元的供水管单元。 供水管单元设置在由第一,第二和第三辅助侧壁的外表面限定的割草机甲板后部空间内。