公开(公告)号：US20050284842A1

公开(公告)日：2005-12-29

申请号：US11156469

申请日：2005-06-21

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C23F4/00 ,  G11B5/65 ,  G11B5/73 ,  G11B5/74 ,  G11B5/82 ,  G11B5/855

CPC分类号： B82Y10/00 ,  C23F4/00 ,  G11B5/732 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.

摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

公开(公告)号：US07438982B2

公开(公告)日：2008-10-21

申请号：US11065142

申请日：2005-02-24

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/66 ,  G11B5/72

CPC分类号： G11B5/855 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24488 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.

摘要翻译： 磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。 在磁记录层或非磁性层上形成由非磁性材料制成的凸形。 每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状 。

公开(公告)号：US07488429B2

公开(公告)日：2009-02-10

申请号：US11156469

申请日：2005-06-21

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

IPC分类号： B44C1/22 ,  G11B5/82 ,  G11B5/65 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

CPC分类号： B82Y10/00 ,  C23F4/00 ,  G11B5/732 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.

摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

公开(公告)号：US20050196650A1

公开(公告)日：2005-09-08

申请号：US11065142

申请日：2005-02-24

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/65 ,  G11B5/82

CPC分类号： G11B5/855 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24488 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.

摘要翻译： 磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。 在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形 ）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。

公开(公告)号：US07247251B2

公开(公告)日：2007-07-24

申请号：US11050769

申请日：2005-02-07

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： H01F1/00

CPC分类号： G11B5/855 ,  H01F41/32

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。

公开(公告)号：US20050060874A1

公开(公告)日：2005-03-24

申请号：US10892373

申请日：2004-07-16

申请人： Mikiharu Hibi ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa

发明人： Mikiharu Hibi ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa

IPC分类号： G11B5/127 ,  G11B5/31 ,  G11B5/84 ,  H01F41/14

CPC分类号： G11B5/84 ,  G11B5/3163 ,  H01F41/14 ,  Y10T29/49043

摘要： A method for processing a work piece including a magnetic material and a method for manufacturing a magnetic recording medium. With the use of these methods, the magnetic recording medium with fine magnetic properties, magnetic recording and reproducing equipment, and the like are efficiently manufactured by processing the work piece including the magnetic material by use of an oxidizing reactive gas and then certainly removing the oxidizing reactive gas. An NH3 gas (a non-oxidized gas including hydrogen elements) is used as a cleaning gas. The cleaning gas is turned into plasma, and then a work piece is dry cleaned by use of the cleaning gas.

摘要翻译： 一种用于处理包括磁性材料的工件的方法和用于制造磁记录介质的方法。 通过使用这些方法，通过使用氧化反应气体处理包括磁性材料的工件，然后确定地除去氧化物，有效地制造具有良好磁性能的磁记录介质，磁记录和再现设备等 反应气体。 使用NH 3气体（包含氢元素的非氧化气体）作为清洁气体。 将清洁气体变成等离子体，然后通过使用清洁气体干燥工件。

公开(公告)号：US07273563B2

公开(公告)日：2007-09-25

申请号：US11048728

申请日：2005-02-03

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： H01F1/00

CPC分类号： H01F41/32 ,  G11B5/855

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括形成为凹凸图案的记录层并且具有良好的记录和再现特性的磁记录介质。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以填充凹凸图案的凹部， 磁性材料; 以及通过干蚀刻去除记录层上方的非磁性材料的多余部分以平坦化非磁性材料和记录层的表面的平整步骤。 扁平化步骤包括前一个平整步骤和后整理步骤。

公开(公告)号：US20050199581A1

公开(公告)日：2005-09-15

申请号：US11015670

申请日：2004-12-20

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/855 ,  B44C1/22

CPC分类号： G11B5/855

摘要： A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.

摘要翻译： 用于填充凹凸图案的凹部的方法，通过该凹凸图案填充凹凸图案的凹部以可靠地使表面平坦化的方法，以及制造磁记录介质的方法，通过该方法具有 可以有效地制造具有足够平坦表面的凹凸图案的磁记录层。 用于填充凹部的填充剂沉积在待处理物体的表面上，该物体具有凹凸图案。 在填料上进一步沉积包层。 然后，通过使用对填料具有较低蚀刻速率的干式蚀刻方法，除去填充物的多余部分和物体表面上方的包层以进行平坦化。

公开(公告)号：US20050186356A1

公开(公告)日：2005-08-25

申请号：US11050769

申请日：2005-02-07

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： G11B5/84 ,  G11B5/855 ,  H01F1/00 ,  H01F41/32

CPC分类号： G11B5/855 ,  H01F41/32

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。

公开(公告)号：US20050175791A1

公开(公告)日：2005-08-11

申请号：US11048728

申请日：2005-02-03

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： G11B5/84 ,  G11B5/855 ,  H01F1/00 ,  H01F41/32

CPC分类号： H01F41/32 ,  G11B5/855

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括形成为凹凸图案的记录层并且具有良好的记录和再现特性的磁记录介质。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以填充凹凸图案的凹部， 磁性材料; 以及通过干蚀刻去除记录层上方的非磁性材料的多余部分以平坦化非磁性材料和记录层的表面的平整步骤。 扁平化步骤包括前一个平整步骤和后整理步骤。