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公开(公告)号：US08390956B2
公开(公告)日：2013-03-05
申请号：US12793608
申请日：2010-06-03
申请人： Shun Tonooka , Reiko Arai , Hiroyuki Nakagawa , Kiwamu Tanahashi
发明人： Shun Tonooka , Reiko Arai , Hiroyuki Nakagawa , Kiwamu Tanahashi
CPC分类号： G11B5/732 , G11B5/667 , Y10T428/24975
摘要： According to one embodiment, a perpendicular magnetic recording medium includes at least one soft magnetic underlayer above a substrate, a seed layer above the at least one soft magnetic underlayer, an intermediate layer above the seed layer, a magnetic recording layer above the intermediate layer, and an overcoat layer above the magnetic recording layer, wherein the seed layer includes a second seed layer above a first seed layer. In another embodiment, the seed layer is a multilayered structure of at least two cycles of a unit of layered film which includes a first seed layer and a second seed layer. The first seed layer includes a non-magnetic alloy having a Face-Centered-Cubic (FCC) structure, and the second seed layer includes a soft magnetic alloy having a FCC structure. Other structures are also disclosed, according to more embodiments.
摘要翻译： 根据一个实施例，垂直磁记录介质包括至少一个在基底上方的软磁性底层，至少一个软磁性底层上方的晶种层，种子层上方的中间层，中间层上方的磁记录层， 以及在所述磁记录层上方的覆盖层，其中所述种子层包括在第一种子层上方的第二种子层。 在另一个实施方案中，种子层是包括第一种子层和第二种子层的分层膜单元的至少两个循环的多层结构。 第一晶种层包括具有面心立方（FCC）结构的非磁性合金，第二晶种层包括具有FCC结构的软磁合金。 根据更多实施例，还公开了其他结构。
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2.发明授权公开(公告)号：US09058831B2
公开(公告)日：2015-06-16
申请号：US13326213
申请日：2011-12-14
摘要： In one embodiment, a perpendicular magnetic recording medium includes an oxide recording layer including an oxide and a non-oxide recording layer which does not contain an oxide positioned above the oxide recording layer. The oxide recording layer includes a region R1 where a grain boundary width in a direction parallel to a plane of formation of R1 increases therealong from a lowermost portion of the oxide recording layer toward a medium surface, a region R3 positioned above R1 wherein a grain boundary width increases therealong toward the medium surface, a region R2 where a grain boundary width of R2 decreases therealong from R1 to R3, with R2 being positioned between R1 and R3, and a region R4 where a grain boundary width of R4 decreases therealong from R3 toward the medium surface, with R4 being positioned above R3 and near an uppermost portion of the oxide recording layer.
摘要翻译： 在一个实施例中，垂直磁记录介质包括氧化物记录层，该氧化物记录层包括不包含位于氧化物记录层上方的氧化物的氧化物和非氧化物记录层。 氧化物记录层包括区域R1，其中平行于R1的形成平面的方向上的晶界宽度从氧化物记录层的最下部朝向介质表面增加，位于R1上方的区域R3，其中晶界 宽度随着介质表面的增加而增加，其中R2的晶界宽度从R1向R3延伸的区域R2，R2位于R1和R3之间，R4的晶界宽度从R3向R3的边界宽度减小 中间表面，其中R4位于R3上方并且靠近氧化物记录层的最上部。
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3.发明申请公开(公告)号：US20130155542A1
公开(公告)日：2013-06-20
申请号：US13326213
申请日：2011-12-14
摘要： In one embodiment, a perpendicular magnetic recording medium includes an oxide recording layer including an oxide and a non-oxide recording layer which does not contain an oxide positioned above the oxide recording layer. The oxide recording layer includes a region R1 where a grain boundary width in a direction parallel to a plane of formation of R1 increases therealong from a lowermost portion of the oxide recording layer toward a medium surface, a region R3 positioned above R1 wherein a grain boundary width increases therealong toward the medium surface, a region R2 where a grain boundary width of R2 decreases therealong from R1 to R3, with R2 being positioned between R1 and R3, and a region R4 where a grain boundary width of R4 decreases therealong from R3 toward the medium surface, with R4 being positioned above R3 and near an uppermost portion of the oxide recording layer.
摘要翻译： 在一个实施例中，垂直磁记录介质包括氧化物记录层，该氧化物记录层包括不包含位于氧化物记录层上方的氧化物的氧化物和非氧化物记录层。 氧化物记录层包括区域R1，其中平行于R1的形成平面的方向上的晶界宽度从氧化物记录层的最下部朝向介质表面增加，位于R1上方的区域R3，其中晶界 宽度随着介质表面的增加而增加，其中R2的晶界宽度从R1向R3延伸的区域R2，R2位于R1和R3之间，R4的晶界宽度从R3向R3的边界宽度减小 中间表面，其中R4位于R3上方并且靠近氧化物记录层的最上部。
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4.发明申请公开(公告)号：US20120307395A1
公开(公告)日：2012-12-06
申请号：US13149780
申请日：2011-05-31
CPC分类号： G11B5/66
摘要： According to one embodiment, a perpendicular magnetic recording medium includes a first granular recording layer characterized by a magnetic anisotropy Ku1, a second granular recording layer above the first granular recording layer characterized by a magnetic anisotropy Ku2, and a third granular recording layer above the second granular recording layer characterized by a magnetic anisotropy Ku3, wherein Ku3 Ku1. In another embodiment, a magnetic medium includes a first recording layer with a first CoCrPt alloy in a first ratio X1, a second recording layer above the first recording layer and having a second CoCrPt alloy in a second ratio X2, and a third recording layer above the second recording layer having a third CoCrPt alloy in a third ratio X3 with each ratio defined as a concentration of Pt divided by a concentration of Cr in the respective CoCrPt alloy, wherein X3 X1.
摘要翻译： 根据一个实施例，垂直磁记录介质包括第一颗粒记录层，其特征在于磁各向异性Ku1，第一颗粒记录层之上的第二粒状记录层，其特征在于磁各向异性Ku2，第二颗粒记录层位于第二颗粒记录层上方 其特征在于磁各向异性Ku3的粒状记录层，其中Ku3
Ku1。 在另一个实施例中，磁介质包括具有第一比率X1的第一CoCrPt合金的第一记录层，第一记录层上方的第二记录层，并且具有第二比率X2的第二CoCrPt合金，以及第三记录层 所述第二记录层具有第三比例X3的第三CoCrPt合金，其中每个比例定义为各自的CoCrPt合金中的Pt的浓度除以Cr的浓度，其中X3 X1。 -
5.发明授权Perpendicular magnetic recording medium (PMRM) and magnetic storage device using the same 有权垂直磁记录介质（PMRM）和使用其的磁存储装置公开(公告)号：US08705208B2
公开(公告)日：2014-04-22
申请号：US12828073
申请日：2010-06-30
申请人： Hiroyuki Nakagawa , Reiko Arai , Ichiro Tamai , Kiwamu Tanahashi
发明人： Hiroyuki Nakagawa , Reiko Arai , Ichiro Tamai , Kiwamu Tanahashi
IPC分类号： G11B5/82
CPC分类号： G11B5/66 , G11B5/1278 , G11B5/65
摘要： According to one embodiment, a PMRM includes a substrate, a soft magnetic underlayer above the substrate, an underlayer above the soft magnetic underlayer, an oxide-containing magnetic layer above the underlayer, and a ferromagnetic layer above the magnetic layer having no oxides. The underlayer controls orientation and segregation of the magnetic layer. The oxide-containing magnetic layer comprises at least two or more magnetic layers, a Cr concentration of the magnetic layer adjacent to the ferromagnetic metal layer is between about 23 at. % and about 32 at. %, and a difference between the Cr concentration of the magnetic layer adjacent to the ferromagnetic metal layer and a magnetic layer having a lowest Cr concentration among the at least three magnetic layers is less than about 25 at. %, the magnetic layer with a lowest Cr concentration has a granular structure, and a nucleation field is greater than about 159.2 kA/m.
摘要翻译： 根据一个实施例，PMRM包括衬底，衬底上方的软磁性底层，软磁性底层上方的底层，底层上方的含氧化物的磁性层以及不含氧化物的磁性层上方的铁磁性层。 底层控制磁性层的取向和偏析。 含氧化物的磁性层包括至少两个或更多个磁性层，与强磁性金属层相邻的磁性层的Cr浓度在约23at。 ％和约32英寸。 ％，并且与所述强磁性金属层相邻的磁性层的Cr浓度与所述至少三个磁性层中具有最低Cr浓度的磁性层之间的差异小于约25at。 ％，具有最低Cr浓度的磁性层具有粒状结构，并且成核场大于约159.2kA / m。
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公开(公告)号：US20100309580A1
公开(公告)日：2010-12-09
申请号：US12793608
申请日：2010-06-03
申请人： Shun Tonooka , Reiko Arai , Hiroyuki Nakagawa , Kiwamui Tanahashi
发明人： Shun Tonooka , Reiko Arai , Hiroyuki Nakagawa , Kiwamui Tanahashi
CPC分类号： G11B5/732 , G11B5/667 , Y10T428/24975
摘要： According to one embodiment, a perpendicular magnetic recording medium includes at least one soft magnetic underlayer above a substrate, a seed layer above the at least one soft magnetic underlayer, an intermediate layer above the seed layer, a magnetic recording layer above the intermediate layer, and an overcoat layer above the magnetic recording layer, wherein the seed layer includes a second seed layer above a first seed layer. In another embodiment, the seed layer is a multilayered structure of at least two cycles of a unit of layered film which includes a first seed layer and a second seed layer. The first seed layer includes a non-magnetic alloy having a Face-Centered-Cubic (FCC) structure, and the second seed layer includes a soft magnetic alloy having a FCC structure. Other structures are also disclosed, according to more embodiments.
摘要翻译： 根据一个实施例，垂直磁记录介质包括至少一个在基底上方的软磁性底层，至少一个软磁性底层上方的晶种层，种子层上方的中间层，中间层上方的磁记录层， 以及在所述磁记录层上方的覆盖层，其中所述种子层包括在第一种子层上方的第二种子层。 在另一个实施方案中，种子层是包括第一种子层和第二种子层的分层膜单元的至少两个循环的多层结构。 第一晶种层包括具有面心立方（FCC）结构的非磁性合金，第二晶种层包括具有FCC结构的软磁合金。 根据更多实施例，还公开了其他结构。
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7.发明申请PERPENDICULAR MAGNETIC RECORDING MEDIUM (PMRM) AND MAGNETIC STORAGE DEVICE USING THE SAME 有权全磁磁记录介质（PMRM）和使用其的磁性存储装置公开(公告)号：US20110002064A1
公开(公告)日：2011-01-06
申请号：US12828073
申请日：2010-06-30
申请人： Hiroyuki Nakagawa , Reiko Arai , Ichiro Tamai , Kiwamu Tanahashi
发明人： Hiroyuki Nakagawa , Reiko Arai , Ichiro Tamai , Kiwamu Tanahashi
CPC分类号： G11B5/66 , G11B5/1278 , G11B5/65
摘要： According to one embodiment, a PMRM includes a substrate, a soft magnetic underlayer above the substrate, an underlayer above the soft magnetic underlayer, an oxide-containing magnetic layer above the underlayer, and a ferromagnetic layer above the magnetic layer having no oxides. The underlayer controls orientation and segregation of the magnetic layer. The oxide-containing magnetic layer comprises at least two or more magnetic layers, a Cr concentration of the magnetic layer adjacent to the ferromagnetic metal layer is between about 23 at. % and about 32 at. %, and a difference between the Cr concentration of the magnetic layer adjacent to the ferromagnetic metal layer and a magnetic layer having a lowest Cr concentration among the at least three magnetic layers is less than about 25 at. %, the magnetic layer with a lowest Cr concentration has a granular structure, and a nucleation field is greater than about 159.2 kA/m.
摘要翻译： 根据一个实施例，PMRM包括衬底，衬底上方的软磁性底层，软磁性底层上方的底层，底层上方的含氧化物的磁性层以及不含氧化物的磁性层上方的铁磁性层。 底层控制磁性层的取向和偏析。 含氧化物的磁性层包括至少两个或更多个磁性层，与强磁性金属层相邻的磁性层的Cr浓度在约23at。 ％和约32英寸。 ％，并且与所述强磁性金属层相邻的磁性层的Cr浓度与所述至少三个磁性层中具有最低Cr浓度的磁性层之间的差异小于约25at。 ％，具有最低Cr浓度的磁性层具有粒状结构，并且成核场大于约159.2kA / m。
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公开(公告)号：US07641774B2
公开(公告)日：2010-01-05
申请号：US11259409
申请日：2005-10-25
IPC分类号： C23C14/34
CPC分类号： C23C14/3414 , G11B5/65 , G11B5/66 , G11B5/667 , G11B5/851
摘要： A perpendicular magnetic recording medium is manufactured having excellent thermal stability and recording performances across the entire disk surface. In one embodiment, the recording layer includes at least two layers deposited by using a reactive sputtering method under an oxygen-containing atmosphere at a deposition rate larger than the second recording layer which is formed on the first recording layer while depositing the first recording layer on the intermediate layer.
摘要翻译： 制造了具有优异的热稳定性和整个盘表面的记录性能的垂直磁记录介质。 在一个实施例中，记录层包括通过使用反应溅射法在含氧气氛下以大于形成在第一记录层上的第二记录层的沉积速率沉积的至少两层，同时将第一记录层沉积在 中间层。
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9.发明申请MAGNETIC RECORDING MEDIUM USING LAYERS HAVING HIGHER- AND LOWER-HK ANISOTROPIC MAGNETIC FIELDS 有权使用具有高，低HK HKS磁场的层的磁记录介质公开(公告)号：US20110122525A1
公开(公告)日：2011-05-26
申请号：US12938214
申请日：2010-11-02
摘要： According to one embodiment, a magnetic recording medium includes a magnetic recording layer formed above a substrate, comprising: a first magnetic layer formed from a [Co/Pt]n multilayered film, wherein the first magnetic layer has a face-centered cubic (fcc) (111) crystal structure, the (111) direction being perpendicular to a film surface thereof, and a second magnetic layer comprising a CoCrPt or CoCrPt alloy film formed above the first magnetic layer, wherein the second magnetic layer has a hexagonal close packed (hcp) (00.1) crystal structure, the (00.1) direction being perpendicular to a film surface thereof. According to another embodiment, a system includes a magnetic recording medium as described above, a magnetic head for reading from and/or writing to the magnetic recording medium, a magnetic head slider for supporting the magnetic head, and a control unit coupled to the magnetic head for controlling operation of the magnetic head.
摘要翻译： 根据一个实施例，磁记录介质包括形成在衬底上的磁记录层，包括：由[Co / Pt] n多层膜形成的第一磁性层，其中第一磁性层具有面心立方（fcc ）（111）晶体结构，（111）方向垂直于其膜表面，以及第二磁性层，其包含形成在第一磁性层上方的CoCrPt或CoCrPt合金膜，其中第二磁性层具有六方密堆积 hcp）（00.1）晶体结构，（00.1）方向垂直于其膜表面。 根据另一个实施例，一种系统包括如上所述的磁记录介质，用于从磁记录介质读取和/或写入磁头的磁头，用于支撑磁头的磁头滑块，以及耦合到磁头的控制单元 用于控制磁头的操作。
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公开(公告)号：US20060086606A1
公开(公告)日：2006-04-27
申请号：US11253431
申请日：2005-10-18
CPC分类号： G11B5/851 , C23C14/0688 , C23C14/345 , C23C14/3492 , G11B5/65 , G11B5/667 , G11B5/7325 , H01J37/34 , H01J37/3426
摘要： Embodiments of the invention provide a manufacturing method which permits a high quality perpendicular magnetic recording medium to be manufactured with a high yield by preventing abnormal discharge which sputters particles from the target. In one embodiment, while the perpendicular magnetic recording medium is formed, DC pulses are applied to the target. During the reversal period (Reversal Time) between sputtering periods, a voltage of the opposite polarity is applied. During the sputtering period, a negative voltage is applied which biases the target surface to a negative potential, causing Ar+ to collide with and sputter CoCrPt and SiO2 for deposition on the intermediate layer. The top surface of the insulation material (SiO2) on the target is charged by Ar+ to have a voltage larger than the target voltage. However, arcing can be prevented since the charge on the surface of the insulation material is neutralized due to a positive voltage applied to the target during the non-sputtering period.
摘要翻译： 本发明的实施方式提供一种制造方法，其可以通过防止从目标物喷射颗粒的异常放电，从而以高产率制造高质量的垂直磁记录介质。 在一个实施例中，当形成垂直磁记录介质时，将DC脉冲施加到目标。 在溅射期间的反转时间（反转时间）期间，施加相反极性的电压。 在溅射期间，施加负电压，将目标表面偏压到负电位，导致Ar +与CoCrPt和SiO 2 2碰撞并溅射以沉积在中间层上。 目标上的绝缘材料（SiO 2）的顶表面由Ar +充电以具有大于目标电压的电压。 然而，由于在非溅射期间由于施加到靶的正电压而使绝缘材料的表面上的电荷中和，因此可以防止电弧。
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