摘要:
An immersion upper layer film composition includes a resin and a solvent. The resin forms a water-stable film during irradiation and is dissolved in a subsequent developer. The solvent contains a monovalent alcohol having 6 or less carbon atoms. The composition is to be applied to form a coat on a photoresist film in an immersion exposure process in which the photoresist film is irradiated through water provided between a lens and the photoresist film.
摘要:
An immersion upper layer film composition includes a resin and a solvent. The resin forms a water-stable film during irradiation and is dissolved in a subsequent developer. The solvent contains a monovalent alcohol having 6 or less carbon atoms. The composition is to be applied to form a coat on a photoresist film in an immersion exposure process in which the photoresist film is irradiated through water provided between a lens and the photoresist film.
摘要:
A perpendicular magnetic recording medium having sufficient perpendicular uniaxial magnetic anisotropy energy and a crystal grain size for realizing an areal recording density of one terabit or more per one square centimeter, and excellent in mass productivity, and a manufacturing method of the same are provided. On a substrate, a substrate-temperature control layer, an underlayer and a magnetic recording layer are sequentially formed. The magnetic recording layer is formed by repeating a magnetic layer stacking step N times (N≧2), which includes a first step of heating the substrate in a heat process chamber, and a second step of depositing, in a deposition process chamber, the magnetic recording layer constituted of an alloy mainly composed of FePt to which at least one kind of non-magnetic material selected from a group constituted of C and an Si oxide is added.
摘要:
A thermally assisted magnetic recording medium includes a substrate and at least two, i.e., first and second magnetic recording layers. These layers are hard magnetic layers and contain magnetic grains and a non-magnetic substance magnetically segregating the magnetic grains at grain boundaries. The first magnetic recording layer has a magnetic anisotropy energy Ku1, a grain volume v1, and energy for maintaining its recording magnetization Ku1v1; the second magnetic recording layer has a magnetic anisotropy energy Ku2, a grain volume v2, and energy for maintaining its recording magnetization Ku2v2; and the ratio Ku1v1/kBT of Ku1v1 to a thermal fluctuation energy kBT, where kB represents a Boltzmann constant and T represents an absolute temperature, and the ratio Ku2v2/kBT of Ku2v2 to kBT satisfy the following conditions: Ku1v1/kBT is larger than Ku2v2/kBT at room temperature, but is smaller than Ku2v2/kBT at temperatures around the Curie temperature of the first magnetic recording layer.
摘要:
A magnetic recording medium having excellent stability of recorded magnetic signals and capable of recording magnetic signals by a thermally assisted magnetic recording system in which a magnetic recording layer of the magnetic recording medium contains ferromagnetic crystal grains of a Co—Ni—Pt alloy with a Pt content of 44 at % or more and 55 at % or less and with an atom content ratio: Ni/(Co+Ni) of 0.64 or more and 0.8 or less. The magnetic recording medium has extremely excellent stability of recorded magnetic signals since the Co—Ni—Pt alloy constituting the magnetic recording layer has an extremely high anisotropy field at a normal temperature. Further, the magnetic recording medium can perform signal recording based on the thermally assisted magnetic recording system since the Co—Ni—Pt alloy constituting the magnetic recording layer has a Curie point within an appropriate temperature range.
摘要:
Embodiments of the present invention provide a perpendicular magnetic recoding medium capable of decreasing exchange coupling between crystal grains while suppressing increase in the crystal grain size of the magnetic recording layer. According to one embodiment, a perpendicular magnetic recoding medium is formed by stacking a seed layer, an intermediate layer, a magnetic recording layer, and a protecting layer all above a substrate. The magnetic recording layer has a granular structure constituted of a plurality of columnar grains comprising a CoCrPt alloy and a grain boundary containing an oxide. The seed layer is formed by stacking a first seed layer, a second seed layer, and a third seed layer in which the first seed layer comprises Ti or Ti alloy having a hexagonal close-packed structure, the second seed layer comprises Cu, Ag, or Al having a face-centered cubic structure or an alloy containing at least one element selected therefrom, and the third seed layer comprises an Ni alloy having a face-centered cubic structure.
摘要:
A perpendicular magnetic recording medium includes an intermediate film formed of a plurality of layers between a soft magnetic film and a perpendicular magnetization film. The intermediate film includes at least two layers, i.e., an oxygen-containing layer, or a nonmetallic element-containing layer containing nitrogen, silicon or carbon, and a metallic layer formed on a surface side of the oxygen-containing layer or the nonmetallic element-containing layer. The metallic layer includes a plurality of isolated island-shaped structures. Crystal grains of the perpendicular magnetization film are formed so as to correspond to the isolated island-shaped structures. As a result, a high recording density is obtained.
摘要:
Embodiments in accordance with the present invention provide a perpendicular magnetic recording medium which is easy to record, offers superior thermal stability of recording magnetization, and allows high-density recording. In one embodiment, a perpendicular magnetic layer with controlled magnetic properties is used as a magnetic storage layer of a perpendicular magnetic recording medium, the magnetic properties having been controlled such that an indicator σhsw [%] of the dispersion of magnetization switching fields in the perpendicular magnetic layer and an indicator Dn [nm] of the intensity of exchange interactions, in film surface directions, in the perpendicular magnetic layer satisfy inequalities σhsw/27+Dn/90 20. The indicators can be measured using a magnetometer.
摘要翻译:根据本发明的实施例提供了易于记录的垂直磁记录介质,提供了优异的记录磁化的热稳定性,并允许高密度记录。 在一个实施例中,使用具有受控磁特性的垂直磁性层作为垂直磁记录介质的磁存储层,其磁特性已经被控制,使得该磁性性质的指示符σ< 垂直磁性层中的磁化开关场的分散和膜的表面方向上的交换相互作用强度的指示器D N n [nm]满足不等式sigmah < / SUB + / 27 + D SUB> / 90 <1和D SUB> 20。 指标可以用磁力计测量。
摘要:
A double-layer perpendicular magnetic recording medium suitable for high density recording is obtained. In one embodiment, a granular recording medium is formed on a undercoating layer, in which a first metal composed of Pt, Pd, or an alloy thereof and a second metal composed of Cr or V are included and their composition is 15%
摘要:
A perpendicular magnetic recording medium includes an intermediate film formed of a plurality of layers between a soft magnetic film and a perpendicular magnetization film. The intermediate film includes at least two layers, i.e., an oxygen-containing layer, or a nonmetallic element-containing layer containing nitrogen, silicon or carbon, and a metallic layer formed on a surface side of the oxygen-containing layer or the nonmetallic element-containing layer. The metallic layer includes a plurality of isolated island-shaped structures. Crystal grains of the perpendicular magnetization film are formed so as to correspond to the isolated island-shaped structures. As a result, a high recording density is obtained.