High resolution temperature sensor

    公开(公告)号:US10247621B1

    公开(公告)日:2019-04-02

    申请号:US15264583

    申请日:2016-09-13

    摘要: In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals. A frequency-ratio engine within the MEMS temperature sensor oversamples at least one of the first and second clock signals with the reference clock signal to generate a ratio of the frequencies of the first and second clock signals.