公开(公告)号：US20120074509A1

公开(公告)日：2012-03-29

申请号：US13259809

申请日：2010-03-26

申请人： Sigrid Berg ,  Kamal Chapagain ,  Jon Due-Hansen ,  Kjell Arne Ingebrigtsen ,  Geir Uri Jensen ,  Kjersti Midtbø ,  Erik Utne Poppe ,  Arne Rønnekleiv ,  Dag Thorstein Wang

发明人： Sigrid Berg ,  Kamal Chapagain ,  Jon Due-Hansen ,  Kjell Arne Ingebrigtsen ,  Geir Uri Jensen ,  Kjersti Midtbø ,  Erik Utne Poppe ,  Arne Rønnekleiv ,  Dag Thorstein Wang

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： B06B1/0292 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

摘要： A wafer bonded CMUT array comprising a plurality of CMUT elements distributed across a substrates, each element comprising a cavity and a signal electrode formed in the substrate, and a conductive membrane closing the cavity and forming a ground electrode, wherein the membranes of the individual elements form an unbroken ground plane across the surface of the array and wherein electrical connection to the signal electrodes is provided by means of a conductive vias depending therefrom through the substrate from the signal electrode to the rear of the substrate.

摘要翻译： 一种晶片结合的CMUT阵列，包括跨越衬底分布的多个CMUT元件，每个元件包括形成在衬底中的空腔和信号电极，以及导电膜封闭空腔并形成接地电极，其中各元件的膜 在阵列的表面上形成不间断的接地平面，并且其中与信号电极的电连接通过从基板从信号电极到基板的后部从基板悬垂的导电通孔提供。

公开(公告)号：US06821252B2

公开(公告)日：2004-11-23

申请号：US10063154

申请日：2002-03-26

申请人： Kjell Arne Ingebrigtsen ,  Arne Ronnekleiv

发明人： Kjell Arne Ingebrigtsen ,  Arne Ronnekleiv

IPC分类号： A61B800

CPC分类号： G01N29/24 ,  A61B8/4494 ,  B06B1/0681 ,  B06B1/0688 ,  B06B2201/76 ,  G01N29/06 ,  G01N29/343 ,  G01N2291/101 ,  G01N2291/106

摘要： A transducer element for ultrasound reception comprises a first active transducer layer connected to a first receiver, and a second active transducer layer laminated to the first active transducer layer and connected to a second receiver. A transducer element for ultrasound transmission comprises a first active transducer layer connected to a first transmitter, and a second active transducer layer laminated to the first transducer layer and connected to a second transmitter. Further aspects of the present invention include a transducer element for ultrasound transmission and reception, a transducer array for ultrasound transmission and reception, and methods for transmitting and receiving ultrasound signals.

摘要翻译： 用于超声波接收的换能器元件包括连接到第一接收器的第一有源换能器层和层压到第一有源换能器层并连接到第二接收器的第二有源换能器层。 用于超声波传输的换能器元件包括连接到第一发射器的第一有源换能器层和层压到第一换能器层并连接到第二发射器的第二有源换能器层。 本发明的另外方面包括用于超声波发射和接收的换能器元件，用于超声波发射和接收的换能器阵列，以及用于发送和接收超声信号的方法。