公开(公告)号：US20170358423A1

公开(公告)日：2017-12-14

申请号：US15592198

申请日：2017-05-11

Applicant: Sodick Co., Ltd.

Inventor： Motohiro INOUE

IPC: H01J37/30 ,  H01J37/20 ,  H01J37/18

CPC classification number: H01J37/3002 ,  H01J37/185 ,  H01J37/20

Abstract: A metal surface modification apparatus having a tilting unit includes holding jigs having respective lower parts having curved surfaces to hold the implants; a movable holding base provided with a plurality of receiving depressions to have curved surfaces corresponding to the curved surfaces of the lower parts; and a stationary pushing plate disposed on the movable holding base to cover the movable holding base, and configured to be moved relative to the movable holding base and to have a plurality of through holes positioned to face the receiving depressions.

公开(公告)号：US20190006148A1

公开(公告)日：2019-01-03

申请号：US16000898

申请日：2018-06-06

Applicant: Sodick Co., Ltd.

Inventor： Motohiro INOUE

IPC: H01J37/30 ,  H05H1/24

CPC classification number: H01J37/30 ,  H05H1/24 ,  H05H1/48

Abstract: It is difficult to perform surface modification by irradiating a side surface of a hole formed on an irradiated object with a low-energy-density electron beam. An irradiated object having an irradiation hole formed thereon is disposed in a vacuum chamber. A cathode electrode is arranged to face a side surface of the irradiation hole. The cathode electrode has a large number of metal projections over an entire surface of a base body, the base body facing at least the side surface of the irradiation hole. A conductive mesh is arranged between the cathode electrode and the side surface of the irradiation hole. The conductive mesh partially contacts the irradiated object and is set to have the same potential as the irradiated object.