公开(公告)号：US12085460B2

公开(公告)日：2024-09-10

申请号：US17599896

申请日：2020-03-19

Applicant: Soitec

Inventor： Sylvain Ballandras ,  Emilie Courjon ,  Florent Bernard ,  Alexandre Raveski

IPC: G01L1/16

CPC classification number: G01L1/165

Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. A differential sensing device may comprise at least one resonator device as described wherein.