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公开(公告)号：US20250055442A1
公开(公告)日：2025-02-13
申请号：US18932048
申请日：2024-10-30
Applicant: Soitec
Inventor： Eric Michoulier , Sylvain Ballandras , Thierry LaRoche
Abstract: A surface elastic wave filter has resonant cavities and comprises a composite substrate formed of a base substrate and a piezoelectric upper layer; at least one input electroacoustic transducer and an output electroacoustic transducer, arranged on the upper layer, and at least one internal reflecting structure, arranged between the input electroacoustic transducer and the output electroacoustic transducer. The internal reflecting structure comprises a first structure comprising at least one reflection grating having a first period and a second structure comprising at least one reflection grating having a second period, the first period being greater than the second period.
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公开(公告)号：US12271774B2
公开(公告)日：2025-04-08
申请号：US16980324
申请日：2019-03-14
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
IPC: H03H9/02 , G06K19/067 , H03H3/08 , H03H9/25
Abstract: A surface acoustic wave tag device is disclosed, comprising: an acoustic wave propagating substrate, at least one transducer structure comprising inter-digitated comb electrodes, and at least one reflecting means, the reflecting means comprising at least one reflector, wherein the acoustic wave propagation substrate is a composite substrate comprising a base substrate and a piezoelectric layer, wherein the crystallographic orientation of the piezoelectric layer with respect to the base substrate is such that the propagation of a shear wave inside the piezoelectric layer and in the direction of propagation corresponding to the acoustic wave is enabled. A physical quantity determining device and a fabrication method of such surface acoustic wave tag device are also disclosed.
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公开(公告)号：US11962288B2
公开(公告)日：2024-04-16
申请号：US18248183
申请日：2022-09-15
Applicant: Soitec
Inventor： Eric Michoulier , Sylvain Ballandras , Thierry LaRoche
CPC classification number: H03H9/643 , H03H9/02653
Abstract: A surface elastic wave filter has resonant cavities and comprises a composite substrate formed of a base substrate and a piezoelectric upper layer; at least one input electroacoustic transducer and an output electroacoustic transducer, arranged on the upper layer, and at least one internal reflecting structure, arranged between the input electroacoustic transducer and the output electroacoustic transducer. The internal reflecting structure comprises a first structure comprising at least one reflection grating having a first period and a second structure comprising at least one reflection grating having a second period, the first period being greater than the second period.
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公开(公告)号：US11936364B2
公开(公告)日：2024-03-19
申请号：US17043559
申请日：2019-03-14
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
CPC classification number: H03H9/02866 , H03H3/08 , H03H9/02574 , H03H9/02661 , H03H9/145 , H03H9/25 , H03H9/6489
Abstract: A surface acoustic wave device comprising a base substrate, a piezoelectric layer and an electrode layer in between the piezoelectric layer and the base substrate, a comb electrode formed on the piezoelectric layer comprising a plurality of electrode means with a pitch p, defined asp=A, with A being the wavelength of the standing acoustic wave generated by applying opposite potentials to the electrode layer and comb electrode, wherein the piezoelectric layer comprises at least one region located in between the electrode means, in which at least one physical parameter is different compared to the region underneath the electrode means or fingers. A method of fabrication for such surface acoustic wave device is also disclosed. The physical parameter may be thickness, elasticity, doping concentration of Ti or number of protons obtained by proton exchange.
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公开(公告)号：US20230366755A1
公开(公告)日：2023-11-16
申请号：US18246081
申请日：2021-09-29
Applicant: Soitec
Inventor： Emilie Courjon , Florent Bernad , Thierry LaRoche , Julien Garcia , Alexandre Clairet , Sylvain Ballandras
IPC: G01L1/16
CPC classification number: G01L1/162
Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, wherein the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators and wherein for at least one resonator, in particular, all resonators, the inter-digitated transducer structure comprises a first material and the reflecting structures a second material different from the first material and/or the inter-digitated transducer structure and the reflecting structures have different geometrical parameters. A differential sensing device comprises at least one resonator device as described herein.
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Patent Agency Ranking
公开(公告)号：US12289100B2
公开(公告)日：2025-04-29
申请号：US18754943
申请日：2024-06-26
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
Abstract: A coupled cavity filter structure that uses a surface acoustic wave, in particular, a guided surface acoustic wave, comprises an acoustic wave propagating substrate, at least one input transducer structure and one output transducer structure, provided over the substrate, each comprising inter-digitated comb electrodes, at least one reflecting structure comprising at least one or more metallic strips positioned at a distance and in between the input and output transducer structures, in the direction of propagation of an acoustic wave. The acoustic wave propagating substrate is a composite substrate comprising a base substrate and a piezoelectric layer. In additional embodiments, a coupled cavity filter structure comprises a groove. In additional embodiments, a SAW ladder filter device comprises at least two coupled cavity filter structures as described herein, wherein the at least two coupled cavity filter structures are positioned on a single line.
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公开(公告)号：US20240348234A1
公开(公告)日：2024-10-17
申请号：US18754943
申请日：2024-06-26
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
CPC classification number: H03H9/6483 , H03H9/02669 , H03H9/02724 , H03H9/02771 , H03H9/02905 , H03H9/6489
Abstract: A coupled cavity filter structure that uses a surface acoustic wave, in particular, a guided surface acoustic wave, comprises an acoustic wave propagating substrate, at least one input transducer structure and one output transducer structure, provided over the substrate, each comprising inter-digitated comb electrodes, at least one reflecting structure comprising at least one or more metallic strips positioned at a distance and in between the input and output transducer structures, in the direction of propagation of an acoustic wave. The acoustic wave propagating substrate is a composite substrate comprising a base substrate and a piezoelectric layer. In additional embodiments, a coupled cavity filter structure comprises a groove. In additional embodiments, a SAW ladder filter device comprises at least two coupled cavity filter structures as described herein, wherein the at least two coupled cavity filter structures are positioned on a single line.
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公开(公告)号：US12095449B2
公开(公告)日：2024-09-17
申请号：US18504791
申请日：2023-11-08
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
CPC classification number: H03H9/6483 , H03H9/02669 , H03H9/02724 , H03H9/02771 , H03H9/02905 , H03H9/6489
Abstract: A coupled cavity filter structure that uses a surface acoustic wave, in particular, a guided surface acoustic wave, comprises an acoustic wave propagating substrate, at least one input transducer structure and one output transducer structure, provided over the substrate, each comprising inter-digitated comb electrodes, at least one reflecting structure comprising at least one or more metallic strips positioned at a distance and in between the input and output transducer structures, in the direction of propagation of an acoustic wave. The acoustic wave propagating substrate is a composite substrate comprising a base substrate and a piezoelectric layer. In additional embodiments, a coupled cavity filter structure comprises a groove. In additional embodiments, a SAW ladder filter device comprises at least two coupled cavity filter structures as described herein, wherein the at least two coupled cavity filter structures are positioned on a single line.
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公开(公告)号：US20240080012A1
公开(公告)日：2024-03-07
申请号：US18504791
申请日：2023-11-08
Applicant: Soitec
Inventor： Sylvain Ballandras , Thierry LaRoche
CPC classification number: H03H9/6483 , H03H9/02669 , H03H9/02724 , H03H9/02771 , H03H9/02905 , H03H9/6489
Abstract: A coupled cavity filter structure that uses a surface acoustic wave, in particular, a guided surface acoustic wave, comprises an acoustic wave propagating substrate, at least one input transducer structure and one output transducer structure, provided over the substrate, each comprising inter-digitated comb electrodes, at least one reflecting structure comprising at least one or more metallic strips positioned at a distance and in between the input and output transducer structures, in the direction of propagation of an acoustic wave. The acoustic wave propagating substrate is a composite substrate comprising a base substrate and a piezoelectric layer. In additional embodiments, a coupled cavity filter structure comprises a groove. In additional embodiments, a SAW ladder filter device comprises at least two coupled cavity filter structures as described herein, wherein the at least two coupled cavity filter structures are positioned on a single line.
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公开(公告)号：US12255634B2
公开(公告)日：2025-03-18
申请号：US18439388
申请日：2024-02-12
Applicant: Soitec
Inventor： Eric Michoulier , Sylvain Ballandras , Thierry LaRoche
Abstract: A surface elastic wave filter has resonant cavities and comprises a composite substrate formed of a base substrate and a piezoelectric upper layer; at least one input electroacoustic transducer and an output electroacoustic transducer, arranged on the upper layer, and at least one internal reflecting structure, arranged between the input electroacoustic transducer and the output electroacoustic transducer. The internal reflecting structure comprises a first structure comprising at least one reflection grating having a first period and a second structure comprising at least one reflection grating having a second period, the first period being greater than the second period.
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