公开(公告)号：US20250023545A1

公开(公告)日：2025-01-16

申请号：US18706565

申请日：2022-11-02

Applicant: Soitec

Inventor： Thierry Laroche ,  Sylvain Ballandras ,  Gabrielle Aspar ,  Emilie Courjon ,  Florent Bernard

IPC: H03H9/10 ,  H03H3/08 ,  H03H9/145

Abstract: A compact and robust encapsulation system for protecting a surface wave device comprises a SAW device and a sealing joint, which seals a second substrate to the base substrate of the SAW device so as to form a cavity, and an antenna connection means arranged outside the cavity on the encapsulation system.

公开(公告)号：US12085460B2

公开(公告)日：2024-09-10

申请号：US17599896

申请日：2020-03-19

Applicant: Soitec

Inventor： Sylvain Ballandras ,  Emilie Courjon ,  Florent Bernard ,  Alexandre Raveski

IPC: G01L1/16

CPC classification number: G01L1/165

Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. A differential sensing device may comprise at least one resonator device as described wherein.