公开(公告)号：US20230366755A1

公开(公告)日：2023-11-16

申请号：US18246081

申请日：2021-09-29

Applicant: Soitec

Inventor： Emilie Courjon ,  Florent Bernad ,  Thierry LaRoche ,  Julien Garcia ,  Alexandre Clairet ,  Sylvain Ballandras

IPC: G01L1/16

CPC classification number: G01L1/162

Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, wherein the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators and wherein for at least one resonator, in particular, all resonators, the inter-digitated transducer structure comprises a first material and the reflecting structures a second material different from the first material and/or the inter-digitated transducer structure and the reflecting structures have different geometrical parameters. A differential sensing device comprises at least one resonator device as described herein.

公开(公告)号：US20250023545A1

公开(公告)日：2025-01-16

申请号：US18706565

申请日：2022-11-02

Applicant: Soitec

Inventor： Thierry Laroche ,  Sylvain Ballandras ,  Gabrielle Aspar ,  Emilie Courjon ,  Florent Bernard

IPC: H03H9/10 ,  H03H3/08 ,  H03H9/145

Abstract: A compact and robust encapsulation system for protecting a surface wave device comprises a SAW device and a sealing joint, which seals a second substrate to the base substrate of the SAW device so as to form a cavity, and an antenna connection means arranged outside the cavity on the encapsulation system.

公开(公告)号：US12085460B2

公开(公告)日：2024-09-10

申请号：US17599896

申请日：2020-03-19

Applicant: Soitec

Inventor： Sylvain Ballandras ,  Emilie Courjon ,  Florent Bernard ,  Alexandre Raveski

IPC: G01L1/16

CPC classification number: G01L1/165

Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. A differential sensing device may comprise at least one resonator device as described wherein.

公开(公告)号：US20240154603A1

公开(公告)日：2024-05-09

申请号：US18549023

申请日：2022-03-03

Applicant: Soitec

Inventor： Sylvain Ballandras ,  Thierry LaRoche ,  Julien Garcia ,  Emilie Courjon

IPC: H03H9/64 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25

CPC classification number: H03H9/6413 ,  H03H9/02574 ,  H03H9/14502 ,  H03H9/25

Abstract: An acoustic wave sensor device comprises a quartz material layer surface; arranged along a first axis, a first interdigitated transducer disposed over the planar surface of the quartz material layer, a first reflection structure disposed over the planar surface of the quartz material layer, and a second reflection structure disposed over the planar surface of the quartz material layer; and arranged along a second axis, a second interdigitated transducer disposed over the planar surface of the quartz material layer, a third reflection structure disposed over the planar surface of the quartz material layer, and a fourth reflection structure disposed over the planar surface of the quartz material layer; and wherein the first axis and the second axis are inclined to each other by a finite angle.